MEMS Optical Switch with Stop Control for Lidar Beam Steering
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Solution Overview
Problem
Current approaches for beam steering in chip-Lidar, such as micro mirror arrays, optical phased arrays, and photonic crystal waveguides, face challenges like limited field of view, complex control electronics, and high laser requirements, making them unsuitable for practical implementation in autonomous vehicles.
Innovation Solution
The development of a MEMS switch-based optical amplitude array that uses a bus waveguide, actuation electrodes, and reaction electrodes to control the position of optical antennas, allowing for 2D beam steering with simpler control electronics and no need for large wavelength tunability, enabling a larger field of view and more straightforward technical stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If micro mirror array or optical phased array is used for beam steering, then beam steering capability is achieved, but device complexity and control electronics complexity increase
Solution Approach 1:
The patent replaces complex electronic beam steering mechanisms (micro mirror arrays, optical phased arrays) with a mechanical MEMS switch approach. The optical antenna is physically moved into position over the bus waveguide using electrostatic actuation, eliminating the need for complex phase control electronics and achieving beam steering through simple mechanical positioning.
Solution Approach 2:
The patent extracts the beam steering function from the complex control electronics system and implements it through a simple mechanical switch mechanism. By separating the optical antenna from the waveguide and using electrostatic forces to position it, the system eliminates the need for complex phase and amplitude control circuits.
2Ease of operation
If photonic crystal waveguides are used for beam steering, then beam steering is achieved, but manufacturing precision and device complexity increase
Solution Approach 1:
The patent replaces photonic crystal waveguide structures with a simple MEMS mechanical switch system. Instead of fabricating complex photonic crystal structures requiring high precision, the system uses electrostatically actuated mechanical components that can be manufactured with standard fabrication processes, significantly reducing manufacturing precision requirements.
3Ease of operation
If wavelength tuning is used for beam steering, then beam steering is achieved, but laser requirement complexity increases
Solution Approach 1:
The patent replaces wavelength tuning mechanisms with mechanical position adjustment. Instead of requiring a laser with large wavelength tunability, the system uses a fixed-wavelength laser and mechanically positions the optical antenna to achieve beam steering, eliminating the complexity of wavelength control and reducing laser requirement specifications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The MEMS switch-based optical amplitude array achieves a larger field of view with simpler control electronics and does not require large wavelength tunability, addressing the limitations of existing technologies and providing a more stable and efficient beam steering solution for chip-Lidar applications.
Implementation Method 1
an actuation electrode supported by the substrate and configured to apply a force to the reaction electrode to control a position of the reaction electrode relative to the bus waveguide
Implementation Method 2
a repulsion electrode supported by the substrate, positioned adjacent to the actuation electrode, and configured to provide a repulsive force to the reaction electrode
Data Source
AI summary
An optical switch includes a bus waveguide supported by a substrate, an actuation electrode supported by the substrate, the actuation electrode having fins that protrude in a direction perpendicular to the substrate and to the bus waveguide, and a reaction electrode having interdigitated fins configured to form a comb drive with the actuation electrode. When a voltage difference between the reaction electrode and the actuation electrode is less than a lower threshold, the reaction electrode is positioned a first distance from the bus waveguide, when the voltage difference between the reaction electrode and the actuation electrode is greater than an upper threshold, the reaction electrode is positioned a second distance from the bus waveguide, and the second distance is less than the first distance.