MEMS Optical Beam Waveguides for Die Stack Alignment

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing optical interconnects between integrated circuit chips face challenges due to alignment issues, cost, complexity, and bandwidth limitations, particularly in stacked die modules, where conductor-based connections restrict power and bandwidth, and external deflection structures increase system complexity and cost.

Innovation Solution

The implementation of MEMS optical beam waveguides with multiple deflection electrodes for two-dimensional alignment and controlled feedback, allowing for precise optical beam alignment and communication between die stacks without external deflection structures, thereby enhancing communication density and reducing power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If conductor-based connections (TSVs) are used for data signal communication between stacked die modules, then electrical connectivity is achieved, but power consumption increases and bandwidth is limited

Engineering Contradiction:
Improvepower consumptionVSAvoidbandwidth
Core Design Contradiction:
PowerVSProductivity

Solution Approach 1:

The patent replaces electrical conductor-based connections (TSVs) with optical waveguide connections for data signal transmission between stacked die modules. This substitution of electrical fields with optical fields enables higher bandwidth communication while reducing power consumption, as optical signals can carry more data simultaneously and experience less resistive heating.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the fundamental transmission medium parameter from electrical conductors to optical waveguides. This parameter change enables the system to overcome the inherent bandwidth limitations and power consumption issues of electrical TSVs by utilizing optical signals that can transmit data at higher rates with lower energy loss.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If external mirrors or deflectors are used to transfer optical information between IC chips, then alignment flexibility is improved, but system complexity and cost increase

Engineering Contradiction:
Improvealignment flexibilityVSAvoidsystem complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges the optical waveguide structure directly with the IC chip substrate, integrating the optical transmission medium into the chip itself rather than using separate external mirrors or deflectors. This integration eliminates the need for additional alignment components while maintaining the ability to direct optical signals between chips through the waveguide paths embedded in the chip structure.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent introduces optical waveguides as intermediary structures that are fabricated as part of the IC chip. These waveguides serve as built-in optical channels that replace the need for external mirrors or deflectors, providing a direct and integrated path for optical signal transmission between chips without requiring complex external alignment mechanisms.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If tight alignment tolerances are used to meet information transmission requirements, then signal transmission quality is improved, but manufacturing cost increases

Engineering Contradiction:
Improvesignal transmission qualityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent performs preliminary alignment by fabricating the optical waveguides and their coupling structures directly into the IC chips during the manufacturing process. This preliminary integration ensures that the optical paths are pre-aligned at the fabrication stage, eliminating the need for costly post-assembly alignment adjustments and reducing manufacturing complexity while maintaining signal transmission quality.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables high-density, low-power, high-performance information systems by providing precise optical alignment and communication between die stacks, improving bandwidth and reducing system complexity and cost, while maintaining alignment even under conditions like vibration or temperature changes.

Implementation Method 1

transfer modulated light signals along an optical fiber or waveguide path

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 2

Multiple deflection electrodes are formed on and around the MEMS optical beam waveguide

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentUS9091820B2Communication system die stack
Publication Date: 2015.07.28 NXP USA INC
  • US9091820B2 patent drawing
  • US9091820B2 patent drawing
  • US9091820B2 patent drawing

AI summary

A high density, low power, high performance information system, method and apparatus are described in which perpendicularly oriented processor and memory die stacks (130, 140, 150, 160, 170) include integrated deflectable MEMS optical beam waveguides (e.g., 190) at each die edge to provide optical communications (182-185) in and between die stacks by supplying deflection voltages to a plurality of deflection electrodes (195-197) positioned on and around each MEMS optical beam waveguide (193-194) to provide two-dimensional alignment and controlled feedback to adjust beam alignment and establish optical communication links between die stacks.