MEMS Oscillator Temperature Feedback for Frequency Compensation

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Solution Overview

Problem

High precision timing devices face challenges in accurately reporting temperature and compensating for temperature-dependent frequency offsets, which affects the stability and accuracy of timing signals in microelectromechanical systems (MEMS) resonators.

Innovation Solution

Integration of a MEMS resonator and temperature transducer within a small form-factor integrated circuit (IC) package that outputs both timing signals and temperature data, enabling temperature-specific frequency compensation by providing coefficients for polynomial expressions or direct frequency correction values, thus allowing for temperature-compensated timing signals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If a MEMS resonator is used for timing signals, then the device achieves small form factor and integration capability, but temperature-dependent frequency offset reduces timing accuracy

Engineering Contradiction:
Improveform factorVSAvoidtiming accuracy
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent implements a feedback mechanism where the resonator temperature is continuously measured by a temperature transducer and this temperature information is fed back to a compensation circuit. The compensation circuit uses the temperature data to calculate and apply frequency correction values to the resonator drive signal, thereby compensating for temperature-dependent frequency offsets and maintaining timing accuracy across varying temperatures.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent changes the operating parameters of the MEMS resonator by dynamically adjusting its drive frequency based on temperature measurements. A polynomial expression relating frequency offset to temperature is used to determine correction values, which are then applied to modify the resonator's operating frequency in real-time, compensating for temperature-induced frequency drift.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If temperature compensation is implemented using polynomial expressions, then frequency accuracy is improved, but device complexity increases

Engineering Contradiction:
Improvefrequency accuracyVSAvoidcompensation circuit complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent performs preliminary characterization of the resonator's temperature-frequency relationship during manufacturing, determining polynomial coefficients that describe the frequency offset as a function of temperature. These pre-determined coefficients are stored in the device and used during operation to calculate compensation values, eliminating the need for complex real-time analysis and simplifying the compensation circuitry.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces a polynomial expression as an intermediary mathematical model that simplifies the relationship between temperature and frequency offset. By using this predetermined polynomial model, the complex physical relationship is converted into a simple calculation using stored coefficients, reducing the computational complexity required in the compensation circuit while maintaining high frequency accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Stability of the object's composition

If temperature tracking is performed during rapid temperature changes, then timing stability is maintained, but response time requirements increase

Engineering Contradiction:
Improvetiming stabilityVSAvoidtemperature response speed
Core Design Contradiction:
Stability of the object's compositionVSSpeed

Solution Approach 1:

The patent implements periodic temperature measurement and compensation updates, where the temperature transducer continuously monitors the resonator temperature at regular intervals. This periodic action ensures that temperature changes are detected and compensated for in a timely manner, maintaining timing stability during rapid temperature transitions without requiring continuous real-time processing that would increase system complexity.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution ensures accurate tracking of resonator temperature and precise frequency compensation, even during rapid temperature changes, enhancing the stability and accuracy of timing signals in MEMS-based systems.

Implementation Method 1

a MEMS resonator and temperature transducer are integrated within a small form-factor integrated circuit (IC) package that outputs both a timing signal according to mechanical vibration of the MEMS resonator

Methodology Applied
Scientific EffectMechanical vibration: Vibration

Implementation Method 2

a MEMS resonator and temperature transducer—aregenerally a temperature-to-digital converter (TDC)—are integrated within a small form-factor integrated circuit (IC) package

Methodology Applied
Scientific EffectTemperature transduction: Thermistor

Data Source

PatentUS11646698B1Temperature-reporting oscillator
Publication Date: 2023.05.09 SITIME CORP
  • US11646698B1 patent drawing
  • US11646698B1 patent drawing
  • US11646698B1 patent drawing

AI summary

In an integrated circuit device having a microelectromechanical-system (MEMS) resonator and a temperature transducer, a clock signal is generated by sensing resonant mechanical motion of the MEMS resonator and a temperature signal indicative of temperature of the MEMS resonator is generated via the temperature transducer. The clock signal and the temperature signal are output from the integrated circuit device concurrently.