Partition Wall Design for MEMS Sealing Reliability
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Solution Overview
Problem
Hermetically sealing functional portions in MEMS devices and other electronic devices is challenging due to the risk of external influences affecting device characteristics, leading to reliability issues, especially when the distance between the functional portion and the aperture is small, causing issues with film formation and material accumulation.
Innovation Solution
A functional device design where a sealing layer forms a space around the functional portion with walls between the functional portion and the aperture, preventing filling material from intruding during film formation processes like vapor deposition or sputtering, thereby maintaining the device's reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the distance between the functional portion and the aperture is reduced to achieve compact layout, then the device size is reduced, but filling material accumulates on the functional portion during film formation, degrading device characteristics and reliability
Solution Approach 1:
The internal space is divided into a first space containing the functional portion and a second space containing the aperture, separated by a partition wall. This segmentation prevents filling material from the second space from reaching the functional portion in the first space, allowing compact layout while maintaining reliability.
Solution Approach 2:
A partition wall is introduced as an intermediary structure between the functional portion and the aperture. This wall acts as a barrier that blocks filling material during film formation processes, enabling the functional portion to be positioned close to the aperture without compromising device characteristics.
2Reliability
If hermetical sealing is implemented to protect the functional portion from external environment, then device reliability is improved, but manufacturing complexity increases due to additional sealing processes
Solution Approach 1:
The partition wall serving as a sealing structure is merged with the substrate structure. The partition wall is formed as an integral part of the substrate through etching and filling processes, combining the substrate and sealing functions into a unified structure, thereby improving reliability while managing manufacturing complexity.
3Area of stationary object
If the aperture is positioned close to the functional portion to reduce device footprint, then area efficiency is improved, but film formation events cause material accumulation on the functional portion, degrading device characteristics
Solution Approach 1:
The internal space is segmented into distinct regions by a partition wall, creating a protected zone for the functional portion. This allows the aperture to be positioned close to the functional portion for area efficiency while the partition wall prevents filling material from compromising manufacturing precision and device characteristics.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the reliability of the device by blocking the filling material from reaching the functional portion, reducing the impact of film formation events and allowing for a more compact layout without compromising device performance.
Implementation Method 1
a partition wall extending from the bottom surface of the internal space toward the top surface in the sealing layer is provided. The partition wall divides the internal space into a first space and a second space. The first space is a space between the partition wall and the functional portion, and the second space is a space between the partition wall and the aperture in the sealing layer.
Implementation Method 2
After an aperture is formed in part of the sealing layer, the sacrifice layer is removed by selective etching through the aperture.
Data Source
AI summary
A functional device in which the functional portion is not influenced by events in film forming, and thereby the reliability of the device can be improved is provided. The functional device includes a substrate, one or a plurality of functional portions formed on a surface of the substrate, a sealing layer that forms a space around the functional portion, and has one or a plurality of apertures sealed with a filling material, and one or a plurality of walls formed between the functional portion and the aperture without separating the space.