MEMS Phase Shifter Electrode Layout for Lower Driving Voltage
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Solution Overview
Problem
Existing MEMS phase shifters face challenges in large-scale production due to complex manufacturing processes, poor device stability, and consistency, as well as the requirement for a large driving voltage.
Innovation Solution
The phase shifter design includes a first substrate with signal and reference electrodes, a first insulating layer, and phase controlling units with a main body portion and connection portions. The main body portion includes short-circuited sub-electrodes, and the connection portions support the main body portion above the signal electrode, allowing for phase shifting with reduced driving voltage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional MEMS phase shifter design is used, then phase shifting function is achieved, but manufacturing complexity increases and device consistency deteriorates
Solution Approach 1:
The phase shifter is divided into multiple independent unit structures, each comprising a signal electrode, reference electrode, insulating layer, and phase controlling unit. This segmentation allows for standardized mass production of identical units, improving manufacturing consistency while reducing overall complexity through modular assembly.
Solution Approach 2:
Multiple first sub-electrodes are short-circuited together and connected to the same connection portion, merging their functions into a single integrated structure. This reduces the number of separate components and connection points, simplifying the manufacturing process while maintaining phase shifting functionality.
2Power
If existing MEMS phase shifter structure is used, then phase control is achieved, but required driving voltage increases
Solution Approach 1:
The phase controlling unit is positioned above the signal electrode with its orthogonal projection overlapping the signal electrode projection, creating a vertical capacitive coupling structure. This three-dimensional arrangement enhances the electric field interaction between electrodes, improving phase control efficiency at lower voltages.
Solution Approach 2:
By adjusting the gap distance between the phase controlling unit and signal electrode, and optimizing the overlapping area of their projections, the capacitance value is tuned to achieve effective phase shifting at reduced driving voltages, lowering power consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design improves the stability and consistency of phase shifting, reduces the complexity of manufacturing, and lowers the required driving voltage, making it more suitable for large-scale production.
Implementation Method 1
The main body portion includes a plurality of first sub-electrodes short-circuited with each other
Implementation Method 2
the at least one connection portion is connected between the main body portion and a portion of the first insulating layer covering the reference electrode
Data Source
AI summary
A phase shifter includes: a first substrate; a signal electrode and a reference electrode on at least one side of an extension direction of the signal electrode; a first insulating layer covering the reference and signal electrodes; and at least one phase controlling unit above the first insulating layer. Each phase controlling unit includes a main body portion and at least one connection portion. Orthogonal projections of the main body portion and the signal electrode on the first substrate at least partially overlap each other. The main body portion and the first insulating layer have a gap therebetween, and the connection portion is connected between the main body portion and a portion of the first insulating layer covering the reference electrode. The main body portion includes first sub-electrodes short-circuited with each other, and at least some of the first sub-electrodes are connected to a same connection portion.