MEMS Phase Shifter Structure for Fast Bridge Separation
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Solution Overview
Problem
Conventional MEMS phase shifters face challenges in quickly separating the bridging section from the signal line due to adhesion, leading to slow response times and potential collapse during phase shifting, which can be exacerbated by increased driving voltage requirements.
Innovation Solution
The phase shifter design includes a bridging section with a spindle-shaped configuration and additional support structures, such as an isolation layer and sub-supports, to enhance deformation and prevent collapse, allowing for faster response times and reduced driving voltage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If conventional MEMS phase shifter design is used, then the structure is simple, but the response time is slow due to adhesion between bridging section and signal line
Solution Approach 1:
The bridging section is divided into multiple segments (first bridging section, second bridging section, third bridging section) that can move independently. This segmentation allows each segment to separate from the signal line more effectively, reducing adhesion effects and improving response time while maintaining manageable structural complexity through modular design.
Solution Approach 2:
The patent introduces vertical spacing between the bridging section and the signal line by lifting the bridging section to a different vertical dimension. This dimensional separation reduces adhesion forces and enables faster response time by allowing the bridging section to move freely in the vertical direction without excessive friction from the signal line.
2Reliability
If driving voltage is increased to prevent collapse, then the stability is improved, but the energy consumption increases
Solution Approach 1:
Support structures are strategically positioned at specific locations (first support structure, second support structure, third support structure) along the bridging section rather than uniformly distributed. This local quality approach provides stability exactly where needed to prevent collapse while minimizing the overall driving voltage required, thereby reducing energy consumption compared to uniform support distribution.
Solution Approach 2:
The support structures are pre-positioned and configured in advance to provide necessary mechanical stability to the bridging section. This preliminary action ensures the bridging section maintains its shape and prevents collapse before operation begins, reducing the driving voltage needed during operation and thus lowering energy consumption.
3Speed
If the bridging section is made more flexible for faster separation, then the response time is improved, but the structural strength decreases
Solution Approach 1:
The bridging section is segmented into multiple sections connected by joints, allowing each segment to be more flexible while the overall structure maintains strength through the distributed segmentation. This enables faster separation speed as each segment can move independently, while the connections between segments provide the necessary structural strength.
Solution Approach 2:
The bridging section employs a flexible membrane or thin film structure that allows rapid deformation and separation from the signal line, improving response time. The flexible nature of this thin film structure enables quick motion, while the overall structural strength is maintained through the support structures and the continuous nature of the membrane connecting the segments.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved design enables quicker separation of the bridging section from the signal line, reducing response time and voltage requirements while maintaining effective phase shifting capabilities.
Implementation Method 1
the bridging section is connected to the first lead and the second lead, and a third lead on a side of the bridging section away from the substrate
Implementation Method 2
Conventional MEMS phase shifters face challenges in quickly separating the bridging section from the signal line due to adhesion
Implementation Method 3
The phase shifter design includes a bridging section with a spindle-shaped configuration and additional support structures, such as an isolation layer and sub-supports, to enhance deformation and prevent collapse
Data Source
AI summary
A phase shifter and a method for preparing a phase shifter are provided. The phase shifter includes at least one phase shifter unit. The phase shifter unit includes a substrate; a first lead and a second lead on the substrate and spaced apart from each other; a bridging section on the first lead and the second lead, wherein the bridging section is connected to the first lead and the second lead; and a third lead on a side of the bridging section away from the substrate.