MEMS Piezoelectric Cooling Element Ultrasonic Vibration

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Solution Overview

Problem

Current cooling solutions for computing devices, such as fans and passive heat spreaders, are inadequate for effectively managing the increasing heat generated by high-performance semiconductor devices, particularly in mobile and larger computing systems, due to space, power, and noise limitations.

Innovation Solution

A micro-electro-mechanical systems (MEMS) active cooling system with a centrally anchored cooling element that utilizes piezoelectric materials to drive fluid flow through vibrational motion, allowing for efficient heat transfer without physical contact with the cooling system components, thereby reducing power consumption and noise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If fans are used to drive air through computing devices, then heat dissipation is improved, but device size, power consumption, and noise increase

Engineering Contradiction:
Improveheat dissipationVSAvoiddevice size
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent employs ultrasonic vibration of a diaphragm membrane to drive air flow through the computing device. The diaphragm vibrates at ultrasonic frequencies (20 kHz or higher) to create acoustic streaming that moves air through heat dissipation channels, eliminating the need for traditional rotating fans while maintaining effective cooling.

Inventive Principle:
Principle #18Mechanical vibration

Solution Approach 2:

The patent replaces the mechanical rotating fan system with an ultrasonic vibration-based acoustic streaming system. This substitution eliminates moving parts such as blades and motors, reducing device complexity, power consumption, and noise while maintaining heat dissipation effectiveness.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Temperature

If fans are used to drive air through computing devices, then heat dissipation is improved, but power consumption increases

Engineering Contradiction:
Improveheat dissipationVSAvoidpower consumption
Core Design Contradiction:
TemperatureVSUse of energy by moving object

Solution Approach 1:

The patent employs ultrasonic vibration of a diaphragm membrane to drive air flow through the computing device. The diaphragm vibrates at ultrasonic frequencies (20 kHz or higher) to create acoustic streaming that moves air through heat dissipation channels, eliminating the need for traditional rotating fans while maintaining effective cooling.

Inventive Principle:
Principle #18Mechanical vibration

Solution Approach 2:

The patent replaces the mechanical rotating fan system with an ultrasonic vibration-based acoustic streaming system. This substitution eliminates moving parts such as blades and motors, reducing device complexity, power consumption, and noise while maintaining heat dissipation effectiveness.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Temperature

If fans are used to drive air through computing devices, then heat dissipation is improved, but noise increases

Engineering Contradiction:
Improveheat dissipationVSAvoidnoise
Core Design Contradiction:
TemperatureVSObject-generated harmful factors

Solution Approach 1:

The patent employs ultrasonic vibration of a diaphragm membrane to drive air flow through the computing device. The diaphragm vibrates at ultrasonic frequencies (20 kHz or higher) to create acoustic streaming that moves air through heat dissipation channels, eliminating the need for traditional rotating fans while maintaining effective cooling.

Inventive Principle:
Principle #18Mechanical vibration

Solution Approach 2:

The patent replaces the mechanical rotating fan system with an ultrasonic vibration-based acoustic streaming system. This substitution eliminates moving parts such as blades and motors, reducing device complexity, power consumption, and noise while maintaining heat dissipation effectiveness.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Temperature

If passive heat spreaders are used in mobile devices, then cooling is provided, but adequate cooling performance cannot be achieved

Engineering Contradiction:
Improvecooling performanceVSAvoidcooling effectiveness
Core Design Contradiction:
TemperatureVSAdaptability or versatility

Solution Approach 1:

The patent employs ultrasonic vibration of a diaphragm membrane to drive air flow through the computing device. The diaphragm vibrates at ultrasonic frequencies (20 kHz or higher) to create acoustic streaming that moves air through heat dissipation channels, eliminating the need for traditional rotating fans while maintaining effective cooling.

Inventive Principle:
Principle #18Mechanical vibration

Solution Approach 2:

The patent utilizes acoustic streaming (a fluid dynamics phenomenon) to drive air flow through the device. The ultrasonic vibration creates pressure gradients and fluid motion that actively transport air through heat dissipation channels, providing active cooling performance in a passive-looking structure suitable for mobile devices.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The MEMS active cooling system enhances heat transfer efficiency by driving fluid at high speeds across the heat-generating structures, allowing for prolonged operation of high-speed processors and improved performance in compact devices without significant noise or power penalties.

Implementation Method 1

drive electronics are configured to drive the first and second portions using a single drive signal

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

The first and second portions are configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure

Methodology Applied
Scientific EffectVibrational motion: Vibration

Data Source

PatentUS20230012794A1Driving of piezoelectrics for MEMS-based cooling systems
Publication Date: 2023.01.19 FRORE SYSTEMS INC
  • US20230012794A1 patent drawing
  • US20230012794A1 patent drawing
  • US20230012794A1 patent drawing

AI summary

A cooling system is described. The cooling system includes a support structure, a cooling element, and drive electronics. The cooling element has a central axis and is supported by the support structure at the central axis. First and second portions of the cooling element are on first and second sides of the central axis and unpinned. The first and second portions of the cooling element undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure. The cooling element further has first and second piezoelectrics having opposite polarizations. The first piezoelectric is part of the first portion of the cooling element. The second piezoelectric is part of the second portion of the cooling element. The drive electronics drive the first and second portions of the cooling element using a single drive signal.