MEMS Piezoelectric Cooling Element Ultrasonic Vibration
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Solution Overview
Problem
Current cooling solutions for computing devices, such as fans and passive heat spreaders, are inadequate for effectively managing the increasing heat generated by high-performance semiconductor devices, particularly in mobile and larger computing systems, due to space, power, and noise limitations.
Innovation Solution
A micro-electro-mechanical systems (MEMS) active cooling system with a centrally anchored cooling element that utilizes piezoelectric materials to drive fluid flow through vibrational motion, allowing for efficient heat transfer without physical contact with the cooling system components, thereby reducing power consumption and noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If fans are used to drive air through computing devices, then heat dissipation is improved, but device size, power consumption, and noise increase
Solution Approach 1:
The patent employs ultrasonic vibration of a diaphragm membrane to drive air flow through the computing device. The diaphragm vibrates at ultrasonic frequencies (20 kHz or higher) to create acoustic streaming that moves air through heat dissipation channels, eliminating the need for traditional rotating fans while maintaining effective cooling.
Solution Approach 2:
The patent replaces the mechanical rotating fan system with an ultrasonic vibration-based acoustic streaming system. This substitution eliminates moving parts such as blades and motors, reducing device complexity, power consumption, and noise while maintaining heat dissipation effectiveness.
2Temperature
If fans are used to drive air through computing devices, then heat dissipation is improved, but power consumption increases
Solution Approach 1:
The patent employs ultrasonic vibration of a diaphragm membrane to drive air flow through the computing device. The diaphragm vibrates at ultrasonic frequencies (20 kHz or higher) to create acoustic streaming that moves air through heat dissipation channels, eliminating the need for traditional rotating fans while maintaining effective cooling.
Solution Approach 2:
The patent replaces the mechanical rotating fan system with an ultrasonic vibration-based acoustic streaming system. This substitution eliminates moving parts such as blades and motors, reducing device complexity, power consumption, and noise while maintaining heat dissipation effectiveness.
3Temperature
If fans are used to drive air through computing devices, then heat dissipation is improved, but noise increases
Solution Approach 1:
The patent employs ultrasonic vibration of a diaphragm membrane to drive air flow through the computing device. The diaphragm vibrates at ultrasonic frequencies (20 kHz or higher) to create acoustic streaming that moves air through heat dissipation channels, eliminating the need for traditional rotating fans while maintaining effective cooling.
Solution Approach 2:
The patent replaces the mechanical rotating fan system with an ultrasonic vibration-based acoustic streaming system. This substitution eliminates moving parts such as blades and motors, reducing device complexity, power consumption, and noise while maintaining heat dissipation effectiveness.
4Temperature
If passive heat spreaders are used in mobile devices, then cooling is provided, but adequate cooling performance cannot be achieved
Solution Approach 1:
The patent employs ultrasonic vibration of a diaphragm membrane to drive air flow through the computing device. The diaphragm vibrates at ultrasonic frequencies (20 kHz or higher) to create acoustic streaming that moves air through heat dissipation channels, eliminating the need for traditional rotating fans while maintaining effective cooling.
Solution Approach 2:
The patent utilizes acoustic streaming (a fluid dynamics phenomenon) to drive air flow through the device. The ultrasonic vibration creates pressure gradients and fluid motion that actively transport air through heat dissipation channels, providing active cooling performance in a passive-looking structure suitable for mobile devices.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The MEMS active cooling system enhances heat transfer efficiency by driving fluid at high speeds across the heat-generating structures, allowing for prolonged operation of high-speed processors and improved performance in compact devices without significant noise or power penalties.
Implementation Method 1
drive electronics are configured to drive the first and second portions using a single drive signal
Implementation Method 2
The first and second portions are configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure
Data Source
AI summary
A cooling system is described. The cooling system includes a support structure, a cooling element, and drive electronics. The cooling element has a central axis and is supported by the support structure at the central axis. First and second portions of the cooling element are on first and second sides of the central axis and unpinned. The first and second portions of the cooling element undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure. The cooling element further has first and second piezoelectrics having opposite polarizations. The first piezoelectric is part of the first portion of the cooling element. The second piezoelectric is part of the second portion of the cooling element. The drive electronics drive the first and second portions of the cooling element using a single drive signal.


