MEMS Piezoelectric Actuator with Motion Restriction for Precise Control
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Solution Overview
Problem
Current microelectromechanical apparatuses for generating physical effects, such as sound or light, lack precise control over movement and efficiency due to limitations in piezoelectric material utilization and electrical field management.
Innovation Solution
A microelectromechanical apparatus featuring an array of moving elements coupled to mechanical supports via flexures with piezoelectric members, controlled by electrical wiring and electrodes to induce movement, with a motion restriction mechanism and a controller processing digital signals to apply sequences of electric fields, ensuring controlled and efficient generation of physical effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If piezoelectric members are used to actuate moving elements in microelectromechanical apparatuses, then physical effects such as sound or light can be generated, but precise control over movement and efficiency are limited
Solution Approach 1:
The apparatus divides the piezoelectric actuation system into multiple independent piezoelectric members, each coupled to specific moving elements through flexures. This segmentation allows individual control of each piezoelectric member, enabling precise control over the movement of specific moving elements while maintaining overall system efficiency.
Solution Approach 2:
The system employs flexures that provide dynamic, compliant coupling between piezoelectric members and moving elements. The flexures allow controlled movement while maintaining mechanical support, enabling the system to achieve both precise movement control and operational efficiency through dynamic adaptation rather than rigid constraints.
2Adaptability or versatility
If electrical fields are applied to piezoelectric members to induce movement, then physical effects are generated, but control over the sequence and timing of electric fields is insufficient
Solution Approach 1:
The system applies electric fields to piezoelectric members in periodic sequences, where each piezoelectric member receives electric fields at specific times according to a predetermined sequence. This periodic application of electric fields enables versatile control over the timing and sequence of moving element actuation while maintaining manageable system complexity through rhythmic, predictable control patterns.
3Manufacturing precision
If moving elements are allowed to move freely in response to piezoelectric actuation, then physical effects are generated, but motion distance control is imprecise
Solution Approach 1:
The system implements localized motion restriction mechanisms at specific positions where moving elements travel. These restriction mechanisms are positioned only where needed to maintain precise motion distance control, while allowing full actuation force to be applied to the moving elements. The local application of constraints enables precision without compromising the overall actuation force available from the piezoelectric members.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and efficient generation of physical effects like sound or light by controlling the movement of moving elements through strategic application of electric fields, enhancing the apparatus's performance and versatility.
Implementation Method 1
at least one piezoelectric member which is operable to be strained by an electrical field applied to the piezoelectric member, thereby flexing the flexure to which the piezoelectric member is coupled
Data Source
AI summary
A microelectromechanical apparatus for generating a physical effect, including an array of moving elements, each coupled to a mechanical support by at least one flexure which is associated with at least one piezoelectric member which is operable to be strained by an electrical field applied to the piezoelectric member, thereby flexing the flexure to which the piezoelectric member is coupled; an electrical wiring, including a group of electrodes, wherein each electrode out of the group of electrodes is coupled to at least one of the piezoelectric members; wherein the electrical wiring is operable to concurrently transfer different sequences of electric fields to different piezoelectric members, thereby controllably inducing movement of moving elements of the array for creating the physical effect; and a motion restriction mechanism for maintaining a maximal motion distance for each of the moving elements when actuated via the corresponding flexure and piezoelectric member.