MEMS Piezoelectric Actuator With Multi-Ring Deformation Amplification
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Solution Overview
Problem
Conventional piezoelectric actuators used in MEMS devices, such as flow regulators and speakers, face challenges with large dimensions, high bias voltages, and low energy efficiency, which hinder miniaturization and increase complexity and energy consumption.
Innovation Solution
A piezoelectric actuator with a deformable structure comprising multiple deformable rings and actuation structures made using thin piezoelectric film MEMS technology, where the deformable structure is integrated with stiffening structures and deformation sensors, allowing for reduced dimensions and low bias voltage operation while maintaining high displacement efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If conventional piezoelectric actuators are used in MEMS devices, then they can provide actuation function, but they have large dimensions and require high bias voltages
Solution Approach 1:
The deformable structure is divided into multiple concentric deformable rings (first deformable ring, second deformable ring, third deformable ring) connected by arms. Each ring can deform independently under actuation, allowing the structure to achieve large displacement through cumulative deformation while maintaining compact dimensions and reducing bias voltage requirements.
Solution Approach 2:
The patent transitions from traditional linear actuator configurations to a multi-ring concentric structure that utilizes radial and axial dimensions simultaneously. The deformable rings expand and contract in the radial direction while the arms transmit this motion axially to the movable platform, achieving high displacement efficiency in a compact volume.
2Use of energy by moving object
If conventional piezoelectric actuators are used, then they can achieve displacement, but they have low energy efficiency
Solution Approach 1:
The patent replaces traditional high-voltage piezoelectric actuation with a low-voltage MEMS-compatible piezoelectric film system. The deformable ring structure amplifies the small strain from low-voltage piezoelectric actuation into large displacement through its geometric configuration, achieving high energy efficiency without sacrificing displacement capability.
Solution Approach 2:
The patent changes the operating voltage parameter from high voltage (conventional piezoelectric) to low voltage (MEMS-compatible). The deformable multi-ring structure compensates for the lower actuation voltage by using mechanical amplification through its concentric geometry, maintaining high displacement efficiency while improving energy efficiency.
3Productivity
If conventional piezoelectric actuators are used, then they can provide actuation, but they hinder miniaturization and increase complexity
Solution Approach 1:
The patent merges multiple functions into the deformable ring structure: the rings themselves serve as both the actuation structure and the deformation elements, while the arms connecting them serve as both structural support and motion transmission components. This integration reduces the number of separate parts and simplifies the overall actuator design, enabling miniaturization.
Solution Approach 2:
The deformable rings serve multiple functions simultaneously: they are the piezoelectric actuation elements, the deformation amplification elements, and the structural connection elements through the arms. This multi-functionality reduces the need for separate components, lowering device complexity while maintaining miniaturization capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables significant reduction in actuator dimensions, lowers energy consumption, and achieves high displacement with low bias voltages, enhancing the energy efficiency and miniaturization potential of MEMS devices.
Implementation Method 1
MEMS actuators operating according to the piezoelectric actuation principle are distinguished by the high energy efficiency and the high deformation accuracy of the movable element
Data Source
AI summary
The MEMS actuator is formed by a body, which surrounds a cavity and by a deformable structure, which is suspended on the cavity and is formed by a movable portion and by a plurality of deformable elements. The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator further comprises at least one plurality of actuation structures, which are supported by the deformable elements and are configured to cause a translation of the movable portion greater than the deformation of each deformable element. The actuation structures each have a respective first piezoelectric region.