Multi-Axis MEMS Positioning Apparatus for Thermal Testing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The high cost of testing microelectromechanical systems (MEMS) devices is a significant production expense, particularly due to the need for comprehensive tri-temperature thermal conditioning, which requires testing over a range of temperatures to ensure accuracy and safety, but existing methods are inefficient and labor-intensive.
Innovation Solution
A positioning apparatus and test system that enables MEMS devices to be tested in various positions and over a range of temperatures using a multi-axis control system, minimizing operator involvement and improving position accuracy and throughput, while reducing test time and costs through a thermal chamber with controlled temperature and rotational drive systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If comprehensive tri-temperature thermal conditioning testing is performed on MEMS devices, then device accuracy and safety are ensured, but testing costs and time increase significantly
Solution Approach 1:
The patent implements a motorized positioning system that dynamically adjusts the MEMS device between different orientations (0°, 45°, 90°) during thermal conditioning testing. This dynamic repositioning capability allows comprehensive testing at multiple angles without manual intervention, ensuring accuracy across all orientations while automating the process to reduce overall testing time and labor costs
Solution Approach 2:
The positioning apparatus is designed to handle multiple testing functions within a single system - it can position MEMS devices at various angles, maintain thermal conditioning environments, and perform automated testing. This multi-functionality consolidates what would otherwise require multiple separate testing setups into one universal platform, reducing both time and cost
2Reliability
If comprehensive tri-temperature thermal conditioning testing is performed on MEMS devices, then device accuracy and safety are ensured, but testing costs increase
Solution Approach 1:
The system incorporates automated positioning and control mechanisms that operate without continuous human intervention. The motorized positioning system automatically adjusts device orientations, and the control system manages the thermal conditioning process autonomously. This self-service capability eliminates labor-intensive manual positioning and reduces operational costs while maintaining comprehensive testing protocols
Solution Approach 2:
The dynamic automated positioning system replaces manual positioning operations with motorized control, reducing labor costs and increasing efficiency. The system can automatically transition between testing angles and positions, eliminating the need for operators to manually reposition devices during thermal conditioning tests
3Ease of operation
If manual positioning methods are used for MEMS device testing, then operator flexibility is maintained, but position accuracy and productivity decrease
Solution Approach 1:
The patent replaces manual mechanical positioning with an automated motorized positioning system. Motors and control mechanisms precisely position the MEMS device at predetermined angles (0°, 45°, 90°) without relying on operator skill or manual adjustment. This substitution maintains operational flexibility through programmable control while achieving consistent, high-precision positioning that eliminates human error
4Ease of operation
If manual positioning methods are used for MEMS device testing, then operator flexibility is maintained, but productivity and throughput decrease
Solution Approach 1:
The automated positioning system operates autonomously to reposition MEMS devices between testing angles without requiring operator intervention. The motorized system quickly and accurately transitions devices between 0°, 45°, and 90° orientations, maintaining testing continuity and maximizing throughput. This self-service capability eliminates idle time associated with manual repositioning while preserving operational flexibility through automated control sequences
Data Source
AI summary
A positioning apparatus includes a support structure, a positioning structure, and a fixture for retaining MEMS devices. A shaft spans between the support structure and the positioning structure, and is configured to rotate about a first axis relative to the support structure in order to rotate the positioning structure and the fixture about the first axis. The positioning structure includes a pair of beams spaced apart by a third beam. Another shaft spans between the pair of beams and is configured to rotate about a second axis relative to the positioning structure in order to rotate the fixture about the second axis. Methodology entails installing the positioning apparatus into a chamber, orienting the fixture into various positions, and obtaining output signals from the MEMS devices to determine functionality of the MEMS devices.