Integrated MEMS Pressure Sensor Baffles for Sediment Control
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Solution Overview
Problem
Prolonged exposure of pressure sensors to gas or liquid leads to sediment deposition, affecting measurement accuracy, and existing baffles increase response time due to increased distance between the sensor and the medium being measured.
Innovation Solution
A MEMS pressure sensor system with an integrated baffle having inlets, outlets, and sealed flow channels, constructed from materials like silicon or nickel, which forces the gas or liquid to change direction and apply an electric field, minimizing sediment deposition and response time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a baffle is placed between the pressure sensor and the gas or liquid to reduce sediment deposition, then the measurement accuracy is improved, but the response time increases due to increased distance
Solution Approach 1:
The baffle is integrated into the sensor housing structure, with the outlet positioned within no more than one millimeter of the pressure sensor. This nesting approach allows the baffle to be embedded within the existing sensor architecture, minimizing the distance between the outlet and sensor while maintaining the sediment-reducing function of the baffle structure.
Solution Approach 2:
The patent positions outlets in multiple dimensions around the pressure sensor, with at least one outlet located within no more than one millimeter of the sensor. This multi-dimensional outlet arrangement allows the system to maintain short flow paths while providing multiple sediment reduction zones, effectively reducing sediment deposition without significantly increasing response time.
2Loss of time
If the baffle outlet is positioned close to the pressure sensor to maintain short response time, then the response time is reduced, but the effectiveness of sediment reduction decreases
Solution Approach 1:
The baffle is divided into multiple segments with multiple outlets positioned at different locations, with at least one outlet within no more than one millimeter of the pressure sensor. This segmentation allows the system to provide both close-proximity outlets for fast response and extended baffle structures for effective sediment reduction, as each segment can independently contribute to both functions.
Solution Approach 2:
Different regions of the baffle are designed with different outlet distances from the pressure sensor. At least one outlet is positioned within no more than one millimeter for rapid response, while other outlets may be positioned at greater distances to enhance sediment reduction effectiveness. This local quality variation allows the system to optimize both response time and sediment reduction in different spatial zones.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The integrated baffle system effectively reduces sediment deposition on the pressure sensor while maintaining a short response time by directing the gas or liquid through tight channels and applying an electric field, enhancing the long-term stability and accuracy of pressure measurements.
Implementation Method 1
The baffle has one or more inlets oriented to receive gas or liquid that enters the entry port; one or more outlets oriented to deliver the received gas or liquid to the pressure sensor; and one or more sealed flow channels that prevent the gas or liquid from escaping from the baffle
Implementation Method 2
The integrated baffle system effectively reduces sediment deposition on the pressure sensor while maintaining a short response time by directing the gas or liquid through tight channels and applying an electric field
Data Source
Figure 1~2A
Figure 2B~2D
Figure 2E~2G
AI summary
A pressure sensor system may sense the pressure of a gas or liquid. The system may include a housing that has an entry port for the gas or liquid; a pressure sensor within the housing; and a baffle positioned between the entry port and the pressure sensor. The baffle may have one or more inlets oriented to receive gas or liquid that enters the entry port; one or more outlets oriented to deliver the received gas or liquid to the pressure sensor; and one or more sealed flow channels that prevent the gas or liquid from escaping from the baffle, other than through the one or more outlets. At least one of the outlets may be located within no more than one millimeter of a location on the pressure sensor. The pressure sensor and baffle may be made at the same time during a process of depositing, pattering, etching, wafer bonding, and/or wafer thinning a series of layers using microelectromechanical systems (MEMS) technology.