MEMS Pressure Sensor for Flexible Interface Control

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Solution Overview

Problem

Existing data-input devices in portable devices like mobile phones, which use digital sensors, lack flexibility in controlling actions within the graphic interface due to binary information, making operations like scrolling or zooming laborious, while analog sensors increase complexity and area occupation, making them unsuitable for portable integration.

Innovation Solution

A data-input device with a microelectromechanical pressure sensor housed in a semiconductor body, including a die with piezoresistive sensitive elements and an integrated interface electronic circuit, allowing for flexible control of actions by detecting actuation intensity and reducing complexity through integrated design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If digital sensors are used in data-input devices, then the device complexity and area occupation are reduced, but the flexibility in controlling actions within the graphic interface is lost due to binary information only

Engineering Contradiction:
Improvedevice complexityVSAvoidflexibility in controlling actions
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The patent merges the digital sensor structure with analog measurement capability by integrating a microelectromechanical pressure sensor that detects continuous pressure variations. The sensor combines a compact digital sensor structure with piezoresistive or piezoelectric elements to provide analog output signals that reflect the intensity of actuation, thereby achieving both low complexity and high flexibility.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent changes the measurement parameter from binary switch states to continuous pressure values. By using a pressure sensor that outputs analog signals proportional to the applied force, the system can detect varying intensities of actuation, enabling flexible control of cursor speed, scrolling rate, and other interface actions while maintaining a simple integrated structure.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If analog sensors with external interface circuits are used, then the flexibility in controlling actions is improved, but the area occupation and device complexity increase

Engineering Contradiction:
Improveflexibility in controlling actionsVSAvoidarea occupation
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The patent combines the sensor element and interface electronic circuit into a single integrated microelectromechanical pressure sensor unit. This integration eliminates the need for separate external circuits and mechanical elements, significantly reducing the area occupation while maintaining the analog measurement capability needed for flexible interface control.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated microelectromechanical pressure sensor serves multiple functions: it acts as both the sensitive element for detecting actuation and the interface circuit for generating electrical signals. This multi-functionality reduces the overall component count and area occupation while providing the necessary analog output for flexible control.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If analog sensors with external interface circuits are used, then the flexibility in controlling actions is improved, but the device complexity increases

Engineering Contradiction:
Improveflexibility in controlling actionsVSAvoiddevice complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges the sensor element and interface electronic circuit into a single integrated microelectromechanical pressure sensor unit. This integration eliminates the need for separate external circuits and mechanical elements, significantly reducing the overall device complexity while maintaining the analog measurement capability needed for flexible interface control.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces traditional mechanical sensing systems with a microelectromechanical pressure sensor that uses piezoresistive or piezoelectric effects. This substitution eliminates complex mechanical linkages and external interface circuits, reducing device complexity while providing accurate analog measurements for flexible control.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables flexible and efficient control of actions within the graphic interface by detecting actuation intensity, reducing area occupation and complexity, making the device more suitable for portable devices.

Implementation Method 1

The sensitive elements of an analog type are piezoelectric or piezoresistive and comprise a mechanical element and an interface electronic circuit external to the mechanical element. The mechanical element undergoes a deformation following upon actuation of the actuator elements and generates an electrical quantity corresponding to the undergone deformation

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS8044929B2Analog data-input device provided with a pressure sensor of a microelectromechanical type
Publication Date: 2011.10.25 STMICROELECTRONICS SRL
  • US8044929B2 patent drawing
  • US8044929B2 patent drawing
  • US8044929B2 patent drawing

AI summary

In a data-input device an actuator element that can be manually actuated, and a sensor mechanically coupled to the actuator element. The sensor is formed in a body of semiconductor material housing a first sensitive element, which detects the actuation of the actuator element and generates electrical control signals. The first sensitive element is a microelectromechanical pressure sensor, formed by: a cavity made within the body; a diaphragm made in a surface portion of the body and suspended above the cavity; and piezoresistive transducer elements integrated in peripheral surface portions of the diaphragm in order to detect its deformations upon actuation of the actuator element.