MEMS Pressure Sensor Redundancy and Self-Testing

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Solution Overview

Problem

In safety-relevant applications like vehicle side airbags, reliable pressure sensor comparisons are hindered by the need for identical pressure conditions, which cannot be ensured during accident risk scenarios, limiting the feasibility of redundant pressure measurement tests.

Innovation Solution

A pressure measuring arrangement featuring two MEMS pressure sensors and an integrated circuit on a shared carrier, allowing for redundant pressure measurement, self-testing, and error detection, ensuring reliable data even if one sensor fails, and providing a warning for incorrect measurements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If redundant pressure sensors are provided for safety-relevant applications, then system reliability is improved, but the ability to perform accurate pressure comparison tests is worsened because identical pressure conditions cannot be ensured during accident risk scenarios

Engineering Contradiction:
Improvesystem reliabilityVSAvoidpressure comparison accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent implements self-testing functionality where the evaluation unit actively tests the pressure sensors before actual use. The system performs preliminary comparison tests of the pressure sensors against each other to verify they are functioning correctly and providing consistent readings, thereby ensuring measurement precision is maintained even in safety-critical scenarios where external pressure conditions cannot be controlled.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If pressure sensors are tested during vehicle starting process, then measurement reliability is verified, but system readiness cannot be ensured before actual accident risk occurs

Engineering Contradiction:
Improvemeasurement reliabilityVSAvoidtime before accident risk
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The system performs self-testing of pressure sensors during the vehicle starting process, which is a preliminary action that verifies sensor functionality before the actual accident risk scenario occurs. This allows the system to confirm measurement reliability in advance without waiting for the critical moment, thereby eliminating the time loss associated with post-incident testing.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The evaluation unit continuously monitors and compares the signals from multiple pressure sensors, providing real-time feedback on their performance. This feedback mechanism allows the system to detect and report any discrepancies or failures in sensor operation, ensuring that measurement reliability is maintained throughout the vehicle's operation period, not just at the time of vehicle starting.

Inventive Principle:
Principle #23Feedback

3Device complexity

If global comparison of pressure sensor signals is performed, then system complexity is reduced, but the ability to detect individual sensor failures is worsened

Engineering Contradiction:
Improvecomparison system complexityVSAvoidsensor failure detection capability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent segments the pressure sensor comparison process into individual sensor evaluation units, each responsible for monitoring specific sensors. The evaluation unit compares signals from multiple pressure sensors individually and identifies which specific sensor may be failing, rather than performing a single global comparison. This segmentation maintains manageable system complexity while significantly improving the ability to detect and isolate individual sensor failures.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables reliable pressure measurement and self-testing capabilities, maintaining system readiness by verifying and compensating for failed sensors, thus preventing incorrect data usage in safety-critical systems.

Implementation Method 1

a first Micro Electro Mechanical System (MEMS) pressure sensor arranged on a carrier, and also a second MEMS pressure sensor arranged on the carrier

Methodology Applied
Scientific EffectMEMS (Micro Electro Mechanical System): Microelectromechanical Systems

Data Source

PatentUS11513015B2Pressure measuring arrangement including two pressure measurement sensors on a carrier
Publication Date: 2022.11.29 INFINEON TECHNOLOGIES AG
  • US11513015B2 patent drawing
  • US11513015B2 patent drawing
  • US11513015B2 patent drawing

AI summary

A method of monitoring microelectromechanical system (MEMS) pressure sensors arranged on a carrier includes: generating a first measurement value by a first MEMS pressure sensor arranged on the carrier; generating a second measurement value by a second MEMS pressure sensor arranged on the carrier; and determining, by an integrated circuit, whether the first measurement value of the first MEMS pressure sensor corresponds to the second measurement value of the second MEMS pressure sensor in accordance with a predefined criterion, wherein the integrated circuit is arranged on the carrier and is coupled to the first MEMS pressure sensor and the second MEMS pressure sensor.