MEMS Probe Plating Layer Orientation for Durability
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Solution Overview
Problem
Conventional MEMS probes with plating layers stacked perpendicular to the elastic deformation direction suffer from interface delamination due to motion stress, leading to reduced durability during repeated testing.
Innovation Solution
The MEMS probe design includes plating layers stacked in the elastic deformation direction, with an elastic connecting portion that is curved along a specific path, using a combination of conductive and elastic plating layers, and an insulation coating to prevent delamination and improve durability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If plating layers are stacked perpendicular to the elastic deformation direction, then the MEMS probe can be manufactured with conventional processes, but interface delamination occurs due to motion stress during repeated testing
Solution Approach 1:
The patent inverts the conventional stacking direction of plating layers. Instead of stacking layers perpendicular to the elastic deformation direction (conventional approach), the layers are stacked parallel to the elastic deformation direction. This inversion resolves the technical contradiction by aligning the plating layers with the deformation direction, preventing interface delamination while maintaining manufacturability through conventional plating processes.
2Productivity
If the MEMS probe undergoes repeated elastic deformation during testing, then the probe can perform multiple tests, but fatigue failure occurs due to motion stress on plating layers
Solution Approach 1:
The patent changes the orientation parameter of the plating layers from perpendicular to parallel relative to the elastic deformation direction. This parameter change reduces the stress concentration on the plating layer interfaces during repeated elastic deformation, preventing fatigue failure and delamination. As a result, the MEMS probe can undergo numerous elastic deformation cycles without failure, significantly improving both productivity (number of tests) and reliability (durability).
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces fatigue failure and enhances the durability of the MEMS probe by aligning plating layers with the deformation direction, minimizing motion-induced stress and preventing delamination, thus maintaining consistent performance during testing.
Implementation Method 1
an elastic connecting portion connecting the first terminal contact portion and the second terminal contact portion, elastically deformed by an approach of the second terminal contact portion
Data Source
AI summary
A microelectromechanical system (MEMS) probe for electric connection between a tested contact point of an object to be tested and a testing contact point of a test circuit. The MEMS probe includes: a first terminal contact portion; a second terminal contact portion movable close to and away from the first terminal contact portion; and an elastic connecting portion connecting the first terminal contact portion and the second terminal contact portion, elastically deformed by an approach of the second terminal contact portion and comprising a plurality of plating layers stacked in the elastic deformation direction. According to the present disclosure, the MEMS probe includes a plurality of plating layers stacked in the elastic deformation direction, thereby decreasing fatigue failure and improving durability.