MEMS Movable Device Pseudo Electrodes for Stable Probe Testing

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Solution Overview

Problem

Movable devices, particularly MEMS devices, face challenges during testing due to oscillations during operation, leading to unsuccessful probe contacts and increased manufacturing costs when assembled into packages for testing.

Innovation Solution

The introduction of pseudo electrodes electrically isolated from the drive structure and arranged symmetrically on the support frame of the movable device, which allows for stable contact with probes during testing, reducing oscillations and enabling efficient testing without package assembly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If testing is performed after package assembly, then probe contact reliability is improved, but manufacturing time and cost increase

Engineering Contradiction:

Improveprobe contact reliabilityVSAvoidtesting time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent applies preliminary action by providing pseudo electrodes on the support frame before package assembly, enabling testing to be performed on the movable device itself without waiting for final assembly. This allows early detection of issues and reduces overall manufacturing time while maintaining reliable probe contact through the pseudo electrode structure.

Inventive Principle:

Principle #10Preliminary action

2Productivity

If probes contact electrodes during movable device operation, then testing can be performed earlier, but oscillations cause unsuccessful contact

Engineering Contradiction:

Improvetesting efficiencyVSAvoidprobe contact success rate

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The patent uses pseudo electrodes as intermediary structures that provide stable contact points for probes during testing. These pseudo electrodes are electrically isolated from the drive structure but mechanically support the movable portion, serving as reliable intermediaries that enable successful probe contact even when the movable device is operating and oscillating.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Reliability

If pseudo electrodes are added to the support frame, then testing reliability is improved, but device complexity increases

Engineering Contradiction:

Improvetesting reliabilityVSAvoidelectrode structure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies segmentation by separating the electrode functions into two distinct groups: electrodes that are electrically coupled to the drive structure for actuation, and pseudo electrodes that are electrically isolated for providing stable probe contact points. This segmentation allows each type to be optimized for its specific function while maintaining overall system reliability without excessive complexity.

Inventive Principle:

Principle #1Segmentation

Data Source

PatentUS20240004185A1Movable device, MEMS device and optical scanning apparatus

Publication Date: 2024.01.04 MITSUMI ELECTRIC CO LTD

AI summary

A movable device includes a movable portion and a drive structure configured to drive the movable portion. The movable device includes a support frame that surrounds the movable portion and supports the drive structure. The movable device includes electrodes electrically coupled to the drive structure. The movable device includes pseudo electrodes electrically isolated from the drive structure. The electrodes and the pseudo electrodes are provided on the support frame.