MEMS Reflective Optical Element for Wide-Angle Laser Scanning

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Solution Overview

Problem

Conventional reflective optical elements have a narrow deflection angle, limiting the irradiation range of laser light, and require significant electric power and size, making them inefficient for applications requiring broader scanning capabilities.

Innovation Solution

A reflective optical element with a micro electro mechanical systems (MEMS) design, featuring a reflector, connection parts, transmission parts, vibrator parts, driver parts, and a base, where the parts are unitarily formed from a substrate, allowing for efficient torque transmission and increased deflection angles through piezoelectric actuation, reducing power consumption and size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Shape

If conventional reflective optical elements are used, then the structure is simple, but the deflection angle is narrow and the irradiation range is limited

Engineering Contradiction:

Improvedeflection angleVSAvoidirradiation range

Core Design Contradiction:

ShapeVSAdaptability or versatility

Solution Approach 1:

The optical element is segmented into multiple independent reflective surfaces (first reflective surface, second reflective surface, third reflective surface) that can be independently controlled. Each surface can be selectively activated to direct light to different target regions, thereby expanding the overall irradiation range beyond what a single reflective surface could achieve.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The optical element employs dynamic control of multiple reflective surfaces with independently adjustable inclination angles. By dynamically changing the activation state and orientation of each reflective surface, the system adapts its deflection characteristics to achieve both narrow and wide deflection angles as needed, resolving the contradiction between structural simplicity and functional versatility.

Inventive Principle:

Principle #15Dynamics

2Device complexity

If conventional reflective optical elements are used, then the structure is straightforward, but the power consumption is high

Engineering Contradiction:

ImprovestructureVSAvoidpower consumption

Core Design Contradiction:

Device complexityVSUse of energy by moving object

Solution Approach 1:

The optical element uses periodic scanning control where only the necessary reflective surfaces are activated at specific time intervals to cover the required field of view. This periodic activation strategy reduces average power consumption compared to conventional systems that must continuously operate all components to maintain the same scanning coverage.

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

By segmenting the reflective surfaces into independently controllable units, the system activates only the minimum necessary surfaces for each scanning phase, reducing overall power consumption while maintaining structural simplicity through the modular design.

Inventive Principle:

Principle #1Segmentation

3Device complexity

If conventional reflective optical elements are used, then the design is simple, but the size is large

Engineering Contradiction:

ImprovedesignVSAvoidsize

Core Design Contradiction:

Device complexityVSVolume of moving object

Solution Approach 1:

The optical element employs a nested configuration where multiple reflective surfaces are arranged in a compact, space-efficient manner. The first, second, and third reflective surfaces are positioned to utilize overlapping or adjacent spatial regions, allowing the system to achieve expanded functional capabilities without proportionally increasing overall device size.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent utilizes three-dimensional spatial arrangement of multiple reflective surfaces with different orientation angles. By exploiting dimensional space efficiently and positioning surfaces in different spatial dimensions, the system achieves broad irradiation coverage without requiring a proportional increase in device footprint, thus reducing overall size while maintaining design simplicity.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables a broader deflection angle and increased scanning capabilities with reduced power consumption and size, enhancing the efficiency and versatility of the reflective optical element for applications such as compact projectors and scanners.

Implementation Method 1

a piezoelectric actuator that vibrates the reflective optical element

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a reflector configured to reflect light... configured to reciprocally move a position irradiated with laser light by reflecting the light

Methodology Applied

Scientific EffectLight reflection: Reflection

Data Source

PatentUS11262576B2Reflective optical element

Publication Date: 2022.03.01 PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO LTD

AI summary

A reflective optical element includes a reflector configured to reflect light, a first connection part connected with the reflector, first and second transmission parts connected with of the first connection part, first and second vibrator parts connected with respective base ends of the first and second transmission parts, first and second driver parts connected with respective head ends of the first and second vibrator parts, a base, and a second connection part connecting the first and second vibrator parts vibratably with the base.