MEMS Relay Flux Path Decoupling for Signal Integrity
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Solution Overview
Problem
Conventional MEMS relays face signal degradation due to flux path fluctuations and have conflicting requirements between core and suspension structures, leading to suboptimal performance in signal switching.
Innovation Solution
A MEMS relay design with a flux path decoupled from the electrical path and a suspension structure independent of the core structure, where the suspension member moves in response to current changes without touching the core, optimizing both flux path geometry and spring stiffness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the flux path and electrical path are coupled in conventional MEMS relays, then the structure is simpler and easier to manufacture, but signal attenuation occurs due to flux fluctuations when passing small amplitude signals
Solution Approach 1:
The patent divides the relay structure into separate flux path components and electrical path components. The flux path includes a core and coil for magnetic actuation, while the electrical path includes switch contacts for signal switching. These two paths are physically decoupled so that magnetic flux fluctuations do not interfere with electrical signal transmission, thereby improving signal transmission quality while maintaining manufacturing feasibility through modular design
Solution Approach 2:
The patent extracts the flux path (core and coil) from the electrical path (switch contacts and traces). By removing the core from the electrical signal path and positioning it separately to provide magnetic actuation only, the design eliminates flux-induced signal attenuation while preserving the essential switching function through independent electrical contacts
2Ease of manufacture
If the suspension structure is formed as part of the core structure, then the manufacturing process is simpler, but conflicting geometric requirements prevent optimal performance of both structures
Solution Approach 1:
The patent segments the suspension structure from the core structure. The suspension structure (including suspension beam and spring elements) is designed as a separate component that mechanically supports the switch contacts, while the core is a separate magnetic component. This segmentation allows each structure to be optimized independently: the core for magnetic flux efficiency and the suspension structure for mechanical performance with appropriate spring stiffness
Solution Approach 2:
The patent applies different geometric optimizations to different parts of the structure. The core is designed with specific dimensions for optimal magnetic flux path, while the suspension structure is designed with different dimensions to achieve desired spring stiffness and mechanical properties. Each local region has quality parameters optimized for its specific function rather than compromising both functions with a single geometry
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design minimizes signal distortion and allows for efficient switching of small amplitude signals by decoupling the flux path from the electrical path, ensuring optimal performance and reducing the force required to close the switch.
Implementation Method 1
a coil that is wrapped around the core... the suspension member moves in response to changes in a current flowing through the coil
Implementation Method 2
conduct a magnetic flux through a portion of the suspension member when a current flows through the coil
Data Source
AI summary
A micro-electromechanical (MEMS) relay decouples a flux path from magnetic actuation from the electrical path through the switch to eliminate signal degradations that result from fluctuations in the current around the core and, thereby the flux. In addition, the MEMS relay has a suspension structure that is independent of the core.


