MEMS Sensor Resonator Integration for Deviation Compensation
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Solution Overview
Problem
MEMS sensors, such as acceleration and inertial sensors, often suffer from systematic measurement deviations due to mechanical stresses, deformations, and assembly errors, which cannot be effectively compensated by conventional methods.
Innovation Solution
The integration of at least two resonators suspended movably in relation to the substrate, which are excited resonantly and used to detect a disturbance variable related to their resonance frequency, allowing for real-time compensation of systematic measurement deviations in MEMS sensors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If resonators are integrated into the MEMS sensor to detect disturbance variables, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The resonators are integrated directly into the MEMS sensor substrate, merging the disturbance detection function with the existing sensor structure. This consolidation allows the resonators to share the same physical platform and processing infrastructure, thereby improving measurement precision while minimizing the increase in device complexity.
Solution Approach 2:
The resonators serve multiple functions: they detect disturbance variables through frequency shifts, provide compensation signals for systematic measurement deviations, and can be used for calibration purposes. This multi-functionality allows a single structural addition to address multiple measurement accuracy issues simultaneously.
2Reliability
If resonant excitation is used to detect disturbance variables, then reliability is improved, but use of energy increases
Solution Approach 1:
The resonators are excited periodically at their resonant frequencies to detect disturbance variables. This periodic excitation allows for efficient energy transfer and sustained oscillation with minimal energy input, enabling reliable disturbance detection while keeping energy consumption manageable through resonance-based amplification of the response signal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables accurate compensation of systematic measurement deviations, improving the reliability and precision of MEMS sensors by providing an independent measure of unknown deformations and stresses during operation.
Implementation Method 1
at least two resonators (10, 11, 12), which are suspended resiliently movably in relation to the substrate (40) in a z-direction perpendicular to the main extension plane... a controllable electrode arrangement (30) designed to excite each of the at least two resonators resonantly, in particular corresponding to a resonance frequency of the resonators
Implementation Method 2
a controllable electrode arrangement (30) designed to excite each of the at least two resonators resonantly... and to capacitively detect a disturbance variable dependent on the resonance frequency of the resonantly excited resonator
Implementation Method 3
The resonance frequencies of the excited resonators are dependent on mechanical stresses or deformations of the substrate, in particular due to the electrostatic spring-softening effect, so that the capacitive detection of the disturbance variable provides an independent measure for unknown deformations
Data Source
AI summary
A MEMS sensor, in particular a MEMS acceleration sensor or MEMS inertial sensor. The MEMS sensor includes: a substrate having a main extension plane; a seismic mass suspended movably with respect to the substrate in at least a z-direction perpendicular to the main extension plane; and a sensor device for detecting a measurement signal dependent on the position of the seismic mass in relation to the substrate. The MEMS sensor also includes: at least two resonators, which are suspended resiliently movably in the z-direction in relation to the substrate; and a controllable electrode arrangement, which is configured to resonantly excite each of the at least two resonators to generate mechanical resonant vibrations, and to capacitively detect a disturbance variable dependent on at least one resonance frequency of the resonant vibrations.