MEMS Resonator Frame Structure to Prevent Cantilever Deformation
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Solution Overview
Problem
Existing MEMS sensors face issues with defects in the resonator due to non-uniform deformation of the cantilever beam structure when attached to a substrate, leading to potential damage and electrical shorts among resonators.
Innovation Solution
A MEMS sensor design featuring a first frame with resonators and a second frame having a monolithic structure, where the second frame is connected to the substrate, providing stability and preventing deformation of the first frame by acting as a support, with specific gap and shape configurations to minimize external force impact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the cantilever beam structure is directly attached to the substrate, then the resonators can be fixed and function, but non-uniform deformation occurs leading to defects and electrical shorts
Solution Approach 1:
The frame is divided into two separate frames: a first frame that supports the resonators and a second frame that provides additional structural support. This segmentation allows each frame to perform its specific function independently, preventing non-uniform deformation while maintaining resonator functionality
Solution Approach 2:
The second frame acts as an intermediary structural element between the substrate and the first frame. It provides a stable foundation and distributes forces uniformly, preventing direct attachment-related deformation issues while still enabling the resonators to function properly
2Stability of the object's composition
If the second frame is positioned close to the first frame to provide support, then stability improves, but gap control becomes critical to prevent contact and deformation
Solution Approach 1:
The gap between the first and second frames is precisely controlled within a specific range (greater than or equal to d1 and less than or equal to 4d1). This parameter control ensures the second frame provides sufficient support for stability while maintaining enough distance to prevent contact and deformation under external forces
Data Source
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AI summary
Provided is a micro electro-mechanical system (MEMS) sensor including a substrate including a first cavity, a first frame including a second cavity at least partially overlapping the first cavity, at least a portion of the first frame being spaced apart from the substrate, a plurality of resonators, each of the plurality of resonators including a first end connected to the first frame and a second end extending into the second cavity, and a second frame including a first region connected to the first frame and a second region spaced apart from the first frame and connected to the substrate.