Acoustic resonator device with controlled placement of functionalization material

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Solution Overview

Problem

MEMS resonator-based biosensors face challenges in achieving high sensitivity for detecting analytes at low concentrations due to non-uniform sensitivity over the sensor surface and excess functionalization material leading to undesirable analyte binding, especially when fluid samples are used.

Innovation Solution

A MEMS resonator device with functionalization material applied only over the central portion of the active region, omitting peripheral areas of lowest sensitivity, and adjusting dimensions and configuration to enhance sensor response, along with the use of self-assembled monolayers and hermeticity layers to improve binding specificity and prevent non-specific analyte attachment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If functionalization material is applied over the entire active region, then the sensor surface area for analyte binding is maximized, but sensitivity becomes non-uniform and detection precision deteriorates due to binding events in low-sensitivity peripheral regions

Engineering Contradiction:
Improvesensor surface areaVSAvoiddetection precision
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The patent applies functionalization material selectively only to the central high-sensitivity region of the active area, creating non-uniform functionalization distribution. This ensures that binding events occur predominantly in regions where the sensor exhibits maximum sensitivity to mass changes, thereby improving detection precision while maintaining sufficient binding surface area.

Inventive Principle:
Principle #3Local quality

2Quantity of substance

If functionalization material is applied over the entire active region, then more binding sites are available for analyte attachment, but non-specific binding increases leading to harmful factors

Engineering Contradiction:
Improvenumber of binding sitesVSAvoidnon-specific binding
Core Design Contradiction:
Quantity of substanceVSObject-generated harmful factors

Solution Approach 1:

By limiting functionalization material application to the central region only, the patent reduces the total quantity of functionalization material present on the sensor surface. This minimizes the number of potential non-specific binding sites while maintaining sufficient specific binding capacity in the high-sensitivity central region, thereby reducing non-specific binding harmful factors.

Inventive Principle:
Principle #3Local quality

3Reliability

If functionalization material is reduced to improve specificity, then non-specific binding decreases, but signal change from mass adsorption diminishes

Engineering Contradiction:
Improvebinding specificityVSAvoidsignal change
Core Design Contradiction:
ReliabilityVSLoss of information

Solution Approach 1:

The patent concentrates functionalization material in the central high-sensitivity region where mass adsorption produces maximum signal response. This strategic localization ensures that binding events occur where they generate the strongest signal, maintaining high signal change despite reduced total functionalization material quantity, while simultaneously improving binding specificity.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the signal change from small mass adsorption, improving detection sensitivity and specificity for analytes in low-concentration fluid samples by focusing binding events on the most sensitive regions of the sensor.

Implementation Method 1

a piezoelectric material arranged between opposing electrodes

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

Presence of functionalization material on or over an active region of an acoustic wave device permits an analyte to be bound to the functionalization material

Methodology Applied
Scientific EffectSpecific binding: Adsorption

Implementation Method 3

any changes to the characteristics of the propagation path affect the velocity and/or amplitude of the wave

Methodology Applied
Scientific EffectAcoustic wave propagation: Acoustics

Data Source

PatentEP3497439B1Acoustic resonator device with controlled placement of functionalization material
Publication Date: 2023.12.20 QORVO US INC
  • EP3497439B1 patent drawingFigure 1A~1C
  • EP3497439B1 patent drawingFigure 2~3
  • EP3497439B1 patent drawingFigure 4~5B

AI summary

A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.