MEMS Resonator Limiting Structure for Vacuum Stability
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing resonance devices, such as MEMS devices, suffer from frequency fluctuations due to collisions between the supporting arm and limiting parts, which can cause scraping and scattering of fine particles, leading to instability.
Innovation Solution
A resonance device with a first limiting part having a first metal film facing the resonator, configured to maintain a vacuum and suppress frequency fluctuations by limiting the displacement of the vibration part and supporting arm, using a first metal film as a getter to improve vacuum integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a limiting part is provided to limit the displacement of the supporting arm, then the vibration space can be maintained, but collisions between the supporting arm and limiting part can cause scraping and fine particle scattering leading to frequency fluctuation
Solution Approach 1:
A buffer part is introduced as an intermediary element between the supporting arm and the limiting part. This buffer part absorbs the impact during collisions, preventing direct contact between the supporting arm and limiting part, thereby eliminating fine particle generation while still allowing the limiting part to maintain the vibration space constraint
Solution Approach 2:
The buffer part is positioned in advance between the supporting arm and limiting part to cushion potential collisions before they occur. This preventive cushioning approach ensures that even if the supporting arm exceeds its normal displacement range, the collision will be soft and不会产生 fine particles
2Ease of operation
If the limiting part is positioned close to the resonator to effectively limit displacement, then vibration control is improved, but the risk of collision and particle scattering increases
Solution Approach 1:
The buffer part serves as a mediator that allows the limiting part to be positioned close to the resonator for effective vibration control, while simultaneously protecting against the harmful effects of collision by absorbing impact energy and preventing direct contact between the supporting arm and limiting part
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses frequency fluctuations by maintaining vacuum integrity and reducing particle scattering, enhancing the stability and performance of the resonance device.
Implementation Method 1
The first metal film is configured as a first getter that maintains a vacuum of a vibration space in the resonance device
Data Source
AI summary
A resonance device includes a resonator including a vibration part, a frame disposed at at least a part of a circumference of the vibration part, and a supporting arm connecting the vibration part to the frame; and a first substrate including a first bottom plate configured to have a first gap from o the vibration part in a thickness direction, a first side wall, and a first limiting part having a first distance to the resonator in the thickness direction smaller than a second distance between the resonator and the first bottom plate. The first limiting part includes a first tip-end with a first metal film facing the resonator in the thickness direction. The first metal film is configured as a first getter that maintains a vacuum of a vibration space in the resonance device.