Width-Variant MEMS Resonator Structure for Better Confinement
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Solution Overview
Problem
Conventional MEMS resonators face challenges in maintaining confinement performance when downsizing, as the aspect ratio needs to be reduced to achieve a desired frequency, leading to inappropriate confinement performance at certain dimensions.
Innovation Solution
A resonator design featuring a vibrator with a substrate and electrodes that perform expansion-contraction vibrations along the width direction, surrounded by a holder and connected via holding arms, includes variant portions that are recessed or projecting in the width direction, allowing for improved confinement performance at arbitrary aspect ratios.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the aspect ratio is reduced to achieve downsizing and desired frequency, then the resonator size is reduced, but the confinement performance becomes inappropriate
Solution Approach 1:
The patent applies local quality by introducing variant portions with different widths at specific locations along the vibrator. The vibrator has a first width at one end and a second width at another location, creating localized structural variations that optimize both the frequency characteristics and confinement performance independently of the overall aspect ratio, thus resolving the contradiction between downsizing and maintaining reliability
Solution Approach 2:
The patent changes the width parameter of the vibrator at different locations to achieve desired performance. By varying the width from the first width at one end to the second width at another location, the patent optimizes the vibration characteristics and confinement performance without being constrained by the traditional aspect ratio requirements, enabling downsizing while maintaining reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances confinement performance across various aspect ratios by optimizing the displacement and vibration patterns, reducing vibration loss and enabling the use of aspect ratios not previously available in conventional designs.
Implementation Method 1
a vibrator that includes a substrate having a major surface specified in width and length directions and one or more electrodes formed on the major surface of the substrate, and that performs, as main vibration, expansion-contraction vibration along the width direction in accordance with a voltage applied to the electrodes
Data Source
AI summary
A vibrator is provided that includes a substrate having a major surface defined in width and length directions and one or more electrodes formed at least in a substantial entire region of the major surface of the substrate in the length direction, and that performs, as main vibration, expansion-contraction vibration along the width direction in accordance with a voltage applied to the electrodes. Moreover, a holder surrounds at least a portion of the vibrator; and a holding arm connects the vibrator to the holder. Moreover, the vibrator has a width Wo in the width direction positioned at an end in the length direction and includes, to have a width Wm differing from the width Wo and positioned between a pair of ends opposing in the length direction, a variant portion at least one or more locations that is in a shape recessed or projecting in the width direction.