MEMS Actuated Ring Resonator for Tunable Optical Coupling

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Solution Overview

Problem

Existing optical power splitters and combiners are bulky, wavelength sensitive, and fixed in their splitting arrangement, leading to over-engineered components with limited flexibility in reacting to changing signaling needs, requiring additional signal processing elements and taking up more space in Photonic Integrated Circuits (PICs).

Innovation Solution

The use of a ring resonator and selectively coupled waveguides controlled by mechanically actuated piezoelectric cantilevers allows for adjustable coupling ratios, enabling flexible splitting and combining of optical signals with reduced size and wavelength sensitivity, using Micro-Electrical-Mechanical (MEM) actuation to change the alignment between optical couplers and adjust coupling efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If traditional Y-branched designs, multi-mode interferometers, or tap couplers are used for optical power splitting, then the device can perform optical signal splitting, but the device becomes bulky and takes up more space in the PIC

Engineering Contradiction:
Improvesplitting arrangement flexibilityVSAvoiddevice footprint
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The patent implements dynamically adjustable optical power splitting by using MEMS actuated cantilevers that can mechanically reposition waveguides to change coupling ratios. This allows the splitting arrangement to be reconfigured after fabrication, providing adaptability without requiring additional space for multiple fixed splitters. The dynamic adjustment capability enables a single compact device to replace multiple fixed splitting components.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The ring resonator-based optical power splitter is designed to perform multiple functions: it can split optical power with adjustable ratios, combine optical signals, and re-route signals dynamically. This multi-functionality eliminates the need for separate dedicated components for each function, reducing the overall device footprint while maintaining versatility in handling different signaling needs.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If fixed splitting arrangements are used in optical devices, then the device structure is simplified, but the device lacks flexibility in reacting to changing signaling needs

Engineering Contradiction:
Improvereactivity to signaling needsVSAvoiddevice structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent employs MEMS actuated cantilevers that can be dynamically controlled to adjust waveguide positions and change coupling ratios in real-time. This dynamic capability allows the device to react to changing signaling needs without requiring complex reconfiguration mechanisms, as the adjustment is achieved through simple mechanical actuation of existing components.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The optical power splitting ratio is made可调 by changing the physical position parameters of the waveguides through MEMS actuation. By mechanically adjusting the distance and alignment between waveguides and the ring resonator, the coupling ratio can be dynamically changed without altering the fundamental device structure, thus maintaining simplicity while enabling adaptability.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If traditional optical power splitters are designed with tolerance margins, then manufacturing reliability is improved, but the components become over-engineered and require additional signal processing elements

Engineering Contradiction:
Improvemanufacturing tolerance marginVSAvoidsignal processing elements
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces the traditional approach of using oversized components with fixed tolerance margins with a mechanical adjustment system (MEMS actuated cantilevers) that can precisely tune the coupling ratio after fabrication. This substitution allows for compact component design while maintaining reliability through post-fabrication calibration, eliminating the need for over-engineered components and additional signal processing elements.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The device includes built-in MEMS actuation mechanisms that enable self-adjustment of the coupling ratio to compensate for manufacturing variations. This self-service capability allows the device to automatically correct for fabrication tolerances without requiring external calibration equipment or additional control circuitry, thus maintaining reliability while minimizing device complexity.

Inventive Principle:
Principle #25Self-service

4Object-affected harmful factors

If bulky optical power splitters are used, then wavelength sensitivity is reduced, but the device takes up more space and requires additional signal processing elements

Engineering Contradiction:
Improvewavelength sensitivityVSAvoiddevice footprint
Core Design Contradiction:
Object-affected harmful factorsVSArea of stationary object

Solution Approach 1:

The ring resonator-based design with MEMS actuated waveguides provides dynamic control over the coupling ratio, allowing the device to be tuned for optimal performance at different wavelengths. This dynamic tuning capability reduces wavelength sensitivity by enabling real-time compensation for wavelength variations without requiring a bulky fixed design, thus achieving low wavelength sensitivity in a compact form factor.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution results in smaller, more flexible optical devices that can dynamically adjust splitting or combining ratios, reducing sensitivity to wavelength variations and manufacturing tolerances, thereby optimizing space usage and performance in PICs.

Implementation Method 1

a selective waveguide disposed on a piezoelectric cantilever mounted in a trench defined in the platform

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a ring resonator disposed on the platform, including at least a first optical coupler, wherein the ring resonator is optically coupled with the bus waveguide

Methodology Applied
Scientific EffectOptical resonance: Resonance

Data Source

PatentUS12092864B2Compact micro electrical mechanical actuated ring-resonator
Publication Date: 2024.09.17 CISCO TECHNOLOGY INC
  • US12092864B2 patent drawing
  • US12092864B2 patent drawing
  • US12092864B2 patent drawing

AI summary

A compact micro electrical mechanical actuated ring-resonator includes a bus waveguide disposed on a platform; a ring resonator disposed on the platform, including at least a first optical coupler, wherein the ring resonator is optically coupled with the bus waveguide; and a selective waveguide disposed on a piezoelectric cantilever mounted in a trench defined in the platform, wherein the selective waveguide includes a second optical coupler and is controllable to selectively adjust a coupling ratio between the first optical coupler with the second optical coupler by physically changing a distance between the first optical coupler and the second optical coupler.