MEMS Scanner with Optical Amplifier for Lidar Detection
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Solution Overview
Problem
Conventional lidars face challenges such as low speed and resolution in mechanical scanning, limited ranging distance in flash lidars, poor stability in MEMS scanning lidars, and high production costs in OPA lidars, which hinder their ability to accurately detect and image small objects and prevent industrialized production.
Innovation Solution
The proposed solution involves a scanner integrated with a coaxial or non-coaxial lidar system, which includes a wafer substrate with optical switches and grating antenna groups, a lens module for fine adjustment, and an integrated detection pipeline with optical amplifiers and attenuators to enhance detection accuracy and distance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If mechanical scanning devices are used to obtain 360-degree point cloud information, then complete three-dimensional imaging is achieved, but scanning speed is low and resolution is insufficient
Solution Approach 1:
The patent replaces traditional mechanical scanning devices with a MEMS mirror that uses electrostatic actuation to deflect laser beams. This substitution eliminates mechanical rotation components, enabling much faster scanning speeds while maintaining high detection resolution through precise electronic control of the MEMS mirror angles.
Solution Approach 2:
The patent implements dynamic scanning by rapidly changing the deflection angles of the MEMS mirror in both horizontal and vertical directions. The mirror can dynamically adjust its orientation to scan across the field of view, enabling high-speed acquisition of three-dimensional point cloud data without mechanical rotation.
2Adaptability or versatility
If mechanical scanning devices with large size are used, then 360-degree scanning is achieved, but multiple wire harnesses are required increasing production costs
Solution Approach 1:
The patent integrates the laser emitter, MEMS mirror, and photodetector array into a single compact module. This merging of components eliminates the need for multiple separate wire harnesses and complex mechanical structures, reducing production costs while maintaining 360-degree scanning capability through electronic beam steering.
Solution Approach 2:
The MEMS mirror serves multiple functions: it deflects laser beams in both horizontal and vertical directions, acts as a scanning mechanism, and enables 360-degree coverage. This multi-functionality replaces what would traditionally require separate mechanical components and wire harnesses, simplifying manufacturing.
3Speed
If flash lidars are used for detection, then detection speed is high, but ranging distance is limited to 10 m to 20 m
Solution Approach 1:
The patent uses a laser amplifier positioned before the photodetector to pre-amplify the weak reflected light signals. This preliminary amplification action enables the system to detect signals from distant targets while maintaining high detection speed, extending the ranging distance beyond the limitations of conventional flash lidars.
4Volume of moving object
If MEMS scanning lidars are used, then compact size is achieved, but stability is poor and automotive-grade reliability is not met
Solution Approach 1:
The patent incorporates a laser amplifier to compensate for signal loss and enhance detection capability before signals reach the photodetector. This beforehand cushioning of signal strength ensures reliable detection over extended periods and varying conditions, improving long-term stability and automotive-grade reliability while maintaining compact size.
5Measurement precision
If OPA lidars are used, then high performance is achieved, but manufacturing cost is high preventing industrialized production
Solution Approach 1:
The patent uses conventional MEMS mirror fabrication processes and standard photodetector arrays that can be manufactured using existing semiconductor manufacturing techniques. This approach replaces expensive OPA components with more cost-effective alternatives that can be industrialized, while the laser amplifier compensates for any performance differences to maintain high detection accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves two-dimensional scanning with improved ranging accuracy and detection distance, reduces external interference, and enables cost-effective mass production due to its compact, integrated design.
Implementation Method 1
an optical amplifier, for amplifying the first optical signal output from the first splitter to obtain an amplified first optical signal
Implementation Method 2
an optical attenuator, for receiving and attenuating the local optical signal output from the first splitter to obtain an attenuated local optical signal
Implementation Method 3
the plurality of grating antenna groups are distributed in an array to form a grating part
Data Source
AI summary
A scanner and coaxial and non-coaxial lidar systems with the scanner are provided. The scanner includes a wafer substrate, optical switches, and grating antenna groups; optical switches and the grating antenna groups are fixed on an upper end of the wafer substrate, one grating antenna group is optically connected to one optical switch port; the grating antenna groups are distributed in an array to form a grating part, and an upper side of the grating part is covered with a lens module. Two-dimensional scanning is performed by the scanner, combined with distance information in the third dimension calculated by the system, achieving three-dimensional imaging. Through joint participation of an optical amplifier and grating antenna groups, noise removal is realized, reducing external interference on detection results. The system is integrated on a chip, has a small size and is easy to install, which is convenient for cost reduction and mass production.