MEMS Scanning Mirrors for Confocal Microscope Size and Speed
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Solution Overview
Problem
Confocal microscopes face challenges due to large bulk optics and slow scan speeds, making them difficult to implement in various applications, particularly in achieving a desirable field of view and working distance, and suffer from issues like beam aberrations and high costs associated with miniaturizing optical components.
Innovation Solution
The use of scanning mirrors and collimating mirrors to direct light between a light source and a target, with dual-axis and single-axis scanning mirror arrangements providing three degrees of freedom for scanning, and a multimodal end-piece interface for acquiring information in multiple modalities, enabling efficient light manipulation and imaging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If traditional bulk optics are used in confocal microscopes, then imaging resolution is maintained, but device size becomes large and scan speed becomes slow
Solution Approach 1:
The patent replaces traditional mechanical bulk optics with MEMS (micro-electro-mechanical systems) scanners that use electrostatic actuation to deflect light beams. This substitution of mechanical scanning systems with micro-fabricated MEMS devices enables faster scan speeds while significantly reducing the overall device size and bulk optics requirements.
Solution Approach 2:
The patent changes the operational parameters by using resonant frequency scanning in MEMS devices, allowing the scanners to operate at their natural resonant frequencies for maximum speed and efficiency. This parameter optimization enables high-speed scanning without requiring large mechanical components.
2Volume of moving object
If optical components are miniaturized to reduce device size, then device compactness is improved, but beam aberrations increase and manufacturing cost increases
Solution Approach 1:
The patent replaces traditional miniaturized optical lenses and prisms with MEMS scanners that use electrostatic fields to control beam direction. This eliminates the need for precision miniaturized optical components that are prone to aberrations, while maintaining compact device size. The MEMS mirrors are fabricated using standard semiconductor manufacturing processes that ensure high precision.
Solution Approach 2:
The patent uses dual-beam confocal microscopy where a reference beam is created as a copy of the illumination beam, allowing for aberration compensation and correction. The reference beam traverses the same optical path and is used to correct for any aberrations introduced by the miniaturized optical components.
3Area of stationary object
If dual-axis scanning is implemented to improve field of view, then imaging coverage is improved, but device complexity increases
Solution Approach 1:
The patent merges the dual-axis scanning functions into a single MEMS scanner device that can deflect beams in both x and y directions. This integration of multiple scanning axes into one compact MEMS component achieves the desired field of view while minimizing device complexity compared to using separate scanning mirrors for each axis.
Solution Approach 2:
The MEMS scanner is designed as a universal component that performs multiple functions: it scans beams in two axes, focuses the confocal beams, and can be dynamically controlled for different scanning patterns. This multi-functionality reduces the need for separate specialized components for each function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for high-resolution imaging with improved scan speeds and flexibility, enabling effective implementation in medical imaging and diagnostics, such as in vivo microscopy for cancer research, while reducing the size and cost of the imaging device.
Implementation Method 1
scanning mirrors and collimating mirrors, that directs light between a light source and a target
Implementation Method 2
The first collimating mirror reflects source light from the dual-axis scanning mirror to a second collimating mirror in two collimated beams
Data Source
AI summary
Aspects of the present invention are directed to apparatuses, arrangements, systems and methods for collecting information using one or more modalities. As consistent with one or more embodiments, an apparatus includes first and second scanning mirror arrangements having different scanning axes and respectively facing different directions. The first scanning mirror arrangement directs source light and image light in two paths, and the second scanning mirror arrangement directs image light from a target to the first scanning mirror arrangement. The first and second scanning mirror arrangements cooperatively scan source light from the first scanning mirror and via the second scanning mirror to target locations with at least two degrees of freedom, and direct image light from the target locations.