MEMS Scanning Module With Vertical Support Elements
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Solution Overview
Problem
Current LIDAR technologies have limited scanning angles and detector apertures, restricting the measurement of objects to close ranges due to the small size of mirrors and lateral spring elements, and synchronization of multiple mirrors is complex, limiting two-dimensional scanning.
Innovation Solution
A scanning module with integrally formed base, interface element, and resilient support elements extending perpendicular to the mirror surface, allowing for large scanning angles of up to 180° and robustness against vibrations, using piezo bending actuators for efficient excitation of degrees of freedom, and balancing weights for frequency adaptation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If lateral spring elements are used to connect the mirror to the substrate, then the mirror can be securely mounted, but the scanning angle is limited to 20°-60° and the mirror area is limited to 1mm-3mm
Solution Approach 1:
The patent transitions from lateral spring elements (in-plane connection) to vertically extending resilient support elements (out-of-plane connection). This dimensional change allows the mirror to achieve larger scanning angles (up to 180°) while maintaining secure mounting, as the vertical extension provides sufficient leverage arm for large angular movements without compromising mechanical stability.
Solution Approach 2:
The mounting structure is segmented into distinct functional components: the base, the vertically extending resilient support elements, and the interface element securing the mirror. This segmentation allows each component to be optimized independently - the resilient elements for large-angle movement and the interface element for secure mirror attachment - thereby achieving both large scanning angles and structural stability.
2Area of stationary object
If multiple mirrors are operated in synchronized manner to increase aperture, then the detector aperture can be increased, but the synchronization becomes elaborate and two-dimensional scanning becomes impossible or limited
Solution Approach 1:
The patent merges multiple mirror surfaces onto a single interface element that is collectively secured by the resilient support elements. This unified structure allows all mirror surfaces to move together as one rigid unit, eliminating the need for complex synchronization between multiple independent mirrors while still achieving a large effective aperture through the combined mirror area.
Solution Approach 2:
The single interface element with multiple mirror surfaces serves multiple functions simultaneously: it provides a large detector aperture, enables two-dimensional scanning capability, and maintains mechanical stability through the vertically extending resilient elements. This multi-functional design eliminates the need for separate synchronized mirror systems.
3Ease of operation
If the resilient support element has small extension perpendicular to the mirror surface, then the structure is compact, but the scanning angle is limited and the element cannot provide sufficient leverage for large movements
Solution Approach 1:
The resilient support elements extend vertically (perpendicular to the mirror surface) rather than lying in the plane of the mirror. This vertical extension creates a longer leverage arm that enables large scanning angles (up to 180°) while the elements themselves remain relatively compact in the horizontal plane, thus achieving large angular movement without excessive overall size.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables large scanning angles and robust, efficient distance measurement of objects over a wider range with improved resistance to external excitations, enhancing the accuracy and range of LIDAR systems.
Implementation Method 1
at least one resilient support element which extends between the base and the interface element
Implementation Method 2
This enables resonant scanning
Implementation Method 3
using piezo bending actuators for efficient excitation of degrees of freedom
Data Source
AI summary
A scanning module (100) for a light scanner (99) comprises a base (141) and an interface element (142) which is configured to secure a mirror surface (151). The scanning module (100) also comprises at least one support element (101, 102) which extends between the base (141) and the interface element (142) and has an extension perpendicular to the mirror surface (151) which is no less than 0.7 mm. The base (141), the interface element (142) and the at least one support element (101) are integrally formed.