MEMS Sensor Anchoring Structure Decoupling Anchor Displacement
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Solution Overview
Problem
MEMS sensors, such as gyroscopes and accelerometers, face measurement errors due to manufacturing tolerances, installation, and environmental factors causing displacement of anchor points, which affects the relative locations of micromechanical components and leads to incorrect scaling and measurement errors.
Innovation Solution
The implementation of a suspended spring-mass system with anchoring structures that decouple active components from direct anchor displacement, using flexible springs and rigid masses to absorb undesired forces and maintain the components' location within the MEMS layer, ensuring accurate measurement by preventing displacement of the suspended spring-mass system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If direct anchoring of micromechanical components is used, then device complexity is reduced, but measurement precision deteriorates due to anchor displacement
Solution Approach 1:
The patent introduces an intermediary anchoring structure consisting of flexible anchors and rigid masses that decouple the active micromechanical components from the substrate. This intermediary structure absorbs anchor displacements and prevents them from being transmitted to the sensing components, thereby maintaining measurement precision while managing the complexity of the anchoring system.
2Stability of the object's composition
If rigid anchoring is used, then structural stability is improved, but measurement precision deteriorates due to stress and force transmission to micromechanical components
Solution Approach 1:
The patent applies different mechanical properties to different parts of the anchoring structure. The anchors are designed to be flexible to absorb displacements, while the rigid masses provide local stability and prevent stress transmission to the active components. This localized differentiation of mechanical properties allows the structure to simultaneously achieve stability and precision.
3Adaptability or versatility
If flexible anchoring is used, then tolerance to anchor displacement is improved, but structural strength deteriorates
Solution Approach 1:
The anchoring structure combines flexible and rigid elements in a composite configuration. The flexible anchors provide tolerance to displacement and stress, while the rigid masses provide structural strength and stability. This composite approach allows the system to simultaneously achieve adaptability to displacement and structural strength.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution significantly reduces measurement errors by maintaining the movable components' location within the MEMS layer, ensuring accurate sensing of parameters like linear acceleration and angular velocity, even under conditions that would otherwise cause displacement.
Implementation Method 1
The movable components are decoupled from the anchors by a plurality of springs and at least one rigid mass
Implementation Method 2
The movable components are decoupled from the anchors by a plurality of springs and at least one rigid mass
Data Source
Figure 1
Figure 2
Figure 3A~3C
AI summary
A MEMS sensor includes a substrate and a MEMS layer. A plurality of anchoring points within the MEMS layer suspend a suspended spring-mass system that includes active micromechanical components that respond to a force of interest such as linear acceleration, angular velocity, pressure, or magnetic field. Springs and rigid masses couple the active components to the anchoring points, such that displacements of the anchoring points do not substantially cause the active components within the MEMS layer to move out-of-plane.