MEMS Sensor Annular Movable Portion Vibration Coupling
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Solution Overview
Problem
Existing sensors with MEMS structures face challenges in improving their characteristics, such as sensitivity and signal intensity, for effective detection of external forces and vibrations.
Innovation Solution
A sensor design featuring a movable portion with multiple annular portions and connect portions arranged along specific radial directions, which enhances vibration coupling and stability, leading to improved sensitivity and signal strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional MEMS sensor structure is used, then the device complexity is low, but the sensitivity and signal intensity are insufficient for effective detection
Solution Approach 1:
The movable portion is divided into multiple annular portions (first, second, and third annular portions) arranged concentrically. Each annular portion can vibrate independently or in conjunction with others, allowing the system to achieve higher sensitivity through coordinated vibration while maintaining manageable structural complexity through modular design
Solution Approach 2:
Multiple annular portions are combined into a single movable portion structure that functions as an integrated vibration detection system. The connect portions merge these annular portions into a coordinated unit that enhances overall signal intensity while maintaining structural coherence
2Power
If the movable portion is made more complex with multiple annular portions, then the signal intensity increases, but the manufacturing precision requirements increase
Solution Approach 1:
The connect portions are positioned asymmetrically relative to the annular portions, with specific radial direction alignments that optimize vibration coupling. This asymmetric arrangement creates preferred vibration paths that enhance signal intensity while providing manufacturing tolerance through the inherent flexibility of the asymmetric design
Solution Approach 2:
The annular portions are arranged in a concentric circular pattern around the fixed portion, utilizing radial and circumferential dimensions. This two-dimensional arrangement allows multiple vibration sources to be coordinated spatially, enhancing signal intensity through geometric arrangement rather than requiring extremely tight manufacturing tolerances in a single dimension
3Measurement precision
If at least three adjacent annular portions vibrate in conjunction, then the detection accuracy improves, but the structural complexity increases
Solution Approach 1:
The connect portions provide continuous mechanical coupling between adjacent annular portions, enabling them to vibrate in conjunction continuously. This continuous connection ensures that vibration energy is transmitted smoothly across all annular portions, maintaining detection accuracy while avoiding the need for complex intermittent coupling mechanisms
Solution Approach 2:
The movable portion is designed with specific geometric parameters (radial directions, concentric arrangement) that naturally enable coordinated vibration of multiple annular portions. By optimizing these geometric parameters, the system achieves enhanced detection accuracy through natural vibration coupling rather than requiring complex active control mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves high sensitivity and signal intensity by ensuring that at least three adjacent annular portions vibrate in conjunction, resulting in stable and accurate detection of external forces and vibrations.
Implementation Method 1
the movable portion includes a plurality of annular portions and a plurality of connect portions... at least three of the plurality of annular portions vibrate in conjunction
Data Source
AI summary
According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, and a movable portion supported by the fixed portion. The movable portion includes a plurality of annular portions and a plurality of connect portions. Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center on a first plane along the first face. The plurality of annular portions includes a first annular portion, a second annular portion, and a third annular portion. The plurality of connect portions includes first and second connect portions. The first connect portion is provided between the first and second annular portions, and is connected to the first and second annular portions. The second connect portion is provided between the second and third annular portions, and is connected to the second and third annular portions.