MEMS Sensor Electrostatic Anti-Spring for Adjustable Sensitivity
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Solution Overview
Problem
Existing MEMS sensors face limitations in adjusting measuring range and sensitivity, requiring complex electronic adjustments or physical replacements, which can introduce noise and reduce measurement accuracy.
Innovation Solution
A micromechanical measuring system with an energy converter, force generator, electrostatic anti-spring, and electromechanical signal converter adjusts sensitivity and measuring range directly via control voltage, eliminating the need for complex electronics and reducing noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electronic signal processing is used to adjust sensitivity and measuring range, then measurement accuracy can be improved, but device complexity and noise increase
Solution Approach 1:
The patent replaces electronic signal processing mechanisms with a mechanical adjustment system. A movable mass on the sensor chip mechanically couples to the proof mass through a mechanical linkage, physically adjusting the sensor's sensitivity and measuring range without requiring complex electronic evaluation circuits. This mechanical substitution eliminates parasitic electrical effects and reduces device complexity while maintaining measurement accuracy.
2Adaptability or versatility
If multiple sensor elements with different measuring ranges are used, then measuring range can be expanded, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent implements a dynamic adjustment mechanism where a movable mass can be repositioned along the sensor chip to change the mechanical coupling between the proof mass and the sensing element. This allows a single sensor element to adapt its measuring range dynamically by adjusting the mechanical linkage, eliminating the need for multiple fixed sensor elements with different ranges and reducing device complexity.
3Measurement precision
If physical replacement of sensor element is used to adjust measuring range, then sensitivity can be changed, but measurement time and productivity decrease
Solution Approach 1:
The patent employs a dynamic mechanical adjustment system where the movable mass can be repositioned during operation to change the sensor's sensitivity and measuring range. This eliminates the need for physical replacement of sensor elements, allowing continuous measurement without interruption and significantly reducing time loss while maintaining the ability to adjust sensitivity as needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables precise adjustment of sensitivity and measuring range on the sensor chip, enhancing measurement accuracy and reducing manufacturing costs through wafer-level production without parasitic electrical effects.
Implementation Method 1
an electrostatic anti-spring which is mechanically connected to the runner, wherein the electrostatic anti-spring is configured to adjust the sensitivity of the measuring system via a control voltage
Implementation Method 2
an energy converter which is configured to convert a physical signal into a displacement of the energy converter
Implementation Method 3
an electromechanical signal converter which converts a displacement of the runner into an electrical signal
Data Source
Figure 1(I)~2(III)
Figure 3
Figure 4~5
AI summary
A measuring system based on micromechanical elements, comprising an energy converter configured to convert a physical signal into a displacement of the energy converter, a force generator configured to convert the displacement from the energy converter into a force on a movable runner 4, an electrostatic actuator mechanically connected to the runner 4, and/or an electrostatic anti-spring mechanically connected to the runner 4, and an electromechanical signal converter that converts a displacement of the runner 4 into an electrical signal, wherein the electrostatic actuator is configured to adjust an offset compensation of the measuring system via a control voltage, and/or the electrostatic anti-spring is configured to adjust a sensitivity of the measuring system via a control voltage.