MEMS Sensor Asymmetric Mass Member for Energy Dissipation
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Solution Overview
Problem
Existing sensors with MEMS structures face challenges in improving their characteristics, such as stability and accuracy, due to energy dissipation and asymmetric elastic wave propagation, which affect the Q-factor and excitation intensity.
Innovation Solution
A sensor design that includes a first member with a higher thickness and density than the substrate, acting as a mass member to suppress energy dissipation, and a sensor section with a housing and sensor element that includes a movable portion and a connect member to facilitate symmetrical vibration in the X-Y plane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional MEMS sensor structure is used, then the sensor can operate with basic functionality, but energy dissipation and asymmetric elastic wave propagation occur, reducing the Q-factor and excitation intensity
Solution Approach 1:
The patent introduces an asymmetric structure by making the first member thicker than the first substrate in the thickness direction. This asymmetric design suppresses asymmetric elastic wave propagation and reduces energy dissipation, thereby improving the Q-factor and excitation intensity uniformity in the X-Y plane, which directly enhances sensor stability and reliability
2Reliability
If the first member thickness is increased to suppress energy dissipation, then the Q-factor improves, but the device complexity increases
Solution Approach 1:
The sensor is divided into distinct components: a first member with greater thickness, a first substrate, and a sensor section with housing and sensor element. This segmentation allows each component to be optimized independently - the first member provides mass and suppresses energy dissipation, while the sensor section maintains measurement functionality, thus improving Q-factor symmetry without excessive overall complexity
Solution Approach 2:
The first member is designed with locally enhanced thickness only in specific regions where mass and energy suppression are needed, rather than uniformly thickening the entire structure. This localized quality improvement suppresses energy dissipation and enhances Q-factor symmetry while minimizing the increase in overall device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed sensor design enhances stability and accuracy by reducing energy dissipation and asymmetric wave propagation, leading to improved Q-factor symmetry and excitation intensity uniformity.
Implementation Method 1
A direction from the first member to the first substrate is along a first direction. A first member thickness of the first member along the first direction is thicker than a first substrate thickness of the first substrate along the first direction
Implementation Method 2
Existing sensors with MEMS structures face challenges in improving their characteristics, such as stability and accuracy, due to energy dissipation and asymmetric elastic wave propagation
Implementation Method 3
The sensor element includes a sensor base, a fixed portion fixed to the sensor base, and a movable portion supported by the fixed portion
Implementation Method 4
there are sensors having a MEMS (Micro Electro Mechanical Systems) structure
Data Source
AI summary
According to one embodiment, a sensor includes a first member, a first substrate, and a sensor section. A direction from the first member to the first substrate is along a first direction. A first member thickness of the first member is thicker than a first substrate thickness of the first substrate along the first direction. The sensor section is provided between the first member and the first substrate, and is fixed to the first member. The substrate is fixed to the sensor section. The sensor section includes a housing and a sensor element provided in the housing. The sensor element includes a sensor base, a fixed portion fixed to the sensor base, and a movable portion supported by the fixed portion. A direction from the fixed portion to the sensor base is along the first direction. A first gap is provided between the sensor base and the movable portion.