MEMS Sensor Segmentation for Acceleration and Temperature Detection
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Solution Overview
Problem
Current sensors utilizing MEMS structures face challenges in enhancing detection accuracy for acceleration and temperature measurements.
Innovation Solution
A sensor design incorporating a first detection element with a base body, supporter, movable parts, counter conductive parts, and a processing part that outputs information on acceleration and temperature based on signals from these components, utilizing resonance frequencies and capacitance sensitivity to improve detection precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a MEMS structure is used for sensor fabrication, then manufacturing efficiency and integration are improved, but detection accuracy and sensitivity are insufficient
Solution Approach 1:
The movable part is divided into multiple beams (first movable beam, second movable beam, third movable beam) arranged in different directions. Each beam is independently supported and can detect acceleration along its specific axis, allowing parallel measurement of multiple acceleration components simultaneously, thereby improving both manufacturing efficiency and detection accuracy
Solution Approach 2:
The sensor structure transitions from detecting only acceleration magnitude to detecting acceleration vectors in multiple dimensions by arranging beams along different axes (X-axis, Y-axis, Z-axis directions). This dimensional expansion enables comprehensive spatial acceleration detection while maintaining MEMS manufacturing advantages
2Device complexity
If temperature dependence is not compensated, then device complexity is reduced, but measurement accuracy deteriorates due to temperature variations
Solution Approach 1:
The sensor utilizes the temperature-dependent resonance frequency characteristics of multiple beams as feedback information. By monitoring resonance frequency shifts of beams with different temperature coefficients, the system can infer temperature changes and compensate for their effects on acceleration measurements, maintaining high accuracy without complex external temperature compensation devices
Solution Approach 2:
The multiple beams serve dual functions: they simultaneously act as acceleration sensing elements and temperature sensing elements. The same structural components used for detecting acceleration along different axes also provide temperature information through their resonance frequency responses, eliminating the need for separate temperature sensors and simplifying the overall device structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves highly accurate detection of acceleration and temperature by leveraging the changes in resonance frequencies and capacitance sensitivity, enabling improved measurement accuracy and sensitivity.
Implementation Method 1
resonance frequencies
Implementation Method 2
capacitance sensitivity
Data Source
AI summary
According to one embodiment, a sensor includes a first detection element, and a processing part. The first detection element includes a base body, a first supporter fixed to the base body, a first movable part, first and second counter conductive parts. The first movable part is supported by the first supporter and separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, a first movable beam including a first beam, and a second movable beam including a second beam. The first beam includes a first end portion and a first other end portion. The second beam includes a second end portion and a second other end portion. The first counter conductive part faces the first movable beam. The second counter conductive part faces the second movable beam.