MEMS Sensor Signal Control for Vibration Direction Bias

The patent implements feedback control through PLL (Phase-Locked Loop) mechanisms that continuously monitor and adjust the vibration direction of the movable portion. The controller receives detection signals from fixed electrodes, processes them through synchronous detection, and feeds back correction signals to maintain accurate vibration orientation, thereby resolving angle-dependent biases while managing system complexity through intelligent control algorithms.

The patent introduces synchronous detection as an intermediary processing stage between the raw sensor signals and the final output. This intermediary mechanism converts the vibration signals into synchronized detection signals that can be more accurately processed, effectively bridging the gap between the physical vibration and the digital measurement system to improve precision without proportionally increasing complexity.

The patent implements self-calibration functionality where the sensor system automatically detects and compensates for its own manufacturing variations. The controller performs self-diagnosis by analyzing the signals from multiple electrodes and automatically adjusts the vibration direction control to account for fabrication tolerances, eliminating the need for extremely tight manufacturing precision while maintaining high measurement accuracy.

The patent dynamically adjusts operational parameters such as drive voltages and detection thresholds based on real-time feedback from the electrode array. By changing these parameters adaptively, the system compensates for fixed manufacturing deviations in electrode positions and dimensions, achieving high measurement precision without requiring ultra-precise manufacturing.

The patent performs preliminary calibration and bias characterization during the manufacturing process or initial operation phase. By pre-determining the angle-dependent bias characteristics and storing correction parameters in memory, the system eliminates the need for complex real-time calculations during actual measurement, thereby improving accuracy while minimizing processing time delays.

The patent implements periodic calibration routines that are executed at predetermined intervals rather than continuously. During normal operation, the system uses pre-computed correction factors, and only periodically re-calibrates to update these factors, thus maintaining high measurement precision while minimizing the time overhead associated with bias suppression processing.