MEMS Sensor Conductive Cage for Stray Radiation Suppression

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Solution Overview

Problem

Existing shielding structures for MEMS sensors are inadequate in suppressing stray electromagnetic radiation, leading to insufficient signal-to-noise ratio, especially in sensitive Micro-ElectroMechanical System (MEMS) devices like sound transducers or microphones, due to insufficient reduction of electrical and electromagnetic interference.

Innovation Solution

A device comprising a MEMS sensor module enclosed by a conductive cage structure with integrated capacitive elements, which acts as a Faraday cage to suppress stray electromagnetic radiation and is thermally insulated to reduce thermal interference, using a capacitive element to shield connecting lines and prevent radiation penetration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If traditional shielding structures are used, then device complexity is reduced, but electromagnetic shielding effectiveness deteriorates

Engineering Contradiction:
Improveelectromagnetic shielding effectivenessVSAvoidshielding structure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The conductive cage structure is nested within the housing, creating a multi-layer shielding configuration where the cage encloses the MEMS sensor module. This nested arrangement provides enhanced electromagnetic shielding without requiring a complete redesign of the housing structure, effectively reducing harmful electromagnetic factors while maintaining reasonable device complexity.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The shielding solution combines conductive materials (for the cage structure) with capacitive elements (for filtering), creating a composite shielding system. This composite approach leverages the strengths of different materials and mechanisms to achieve superior electromagnetic shielding effectiveness compared to single-material solutions.

Inventive Principle:
Principle #40Composite materials

2Object-affected harmful factors

If conductive cage structure is added, then electromagnetic shielding effectiveness is improved, but thermal insulation performance deteriorates

Engineering Contradiction:
Improveelectromagnetic radiation suppressionVSAvoidthermal interference
Core Design Contradiction:
Object-affected harmful factorsVSTemperature

Solution Approach 1:

The shielding system is segmented into distinct functional components: the conductive cage structure for electromagnetic shielding and the capacitive elements for both electromagnetic filtering and thermal management. This segmentation allows each component to be optimized for its specific function, enabling the cage to provide shielding while the capacitive elements help manage thermal interference.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The capacitive elements serve as intermediaries between the conductive cage structure and the MEMS sensor module. They provide electromagnetic filtering while also acting as thermal barriers, mediating the thermal interaction between the cage and the sensitive sensor, thus reducing thermal interference while maintaining shielding effectiveness.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Object-affected harmful factors

If connecting lines are shielded with capacitive elements, then electrical interference reduction is improved, but device complexity increases

Engineering Contradiction:
Improveelectrical interference reductionVSAvoidconnecting line configuration
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The capacitive elements are designed to serve multiple functions: they act as electromagnetic shields for the connecting lines, provide filtering for stray radiation, and contribute to the overall shielding effectiveness of the cage structure. This multi-functionality reduces the need for separate components, thereby limiting the increase in device complexity while achieving improved electrical interference reduction.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively enhances the signal-to-noise ratio for MEMS sensors by reducing both electrical and thermal interference, improving the detection accuracy of ambient parameters while maintaining acoustic wave transmission with minimal attenuation.

Implementation Method 1

The conductive cage structure may enclose the MEMS sensor module in order to suppress penetration of stray electromagnetic radiation with a stray wavelength λo into the conductive cage structure

Methodology Applied
Scientific EffectFaraday cage: Faraday Cage

Implementation Method 2

The at least one connecting line may be connected to the MEMS sensor module and fed through the conductive cage structure by means of a capacitive element

Methodology Applied
Scientific EffectCapacitive shielding: Capacitance

Implementation Method 3

The conductive cage structure may be arranged thermally insulated from the MEMS sensor module

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentUS11136237B2Device for suppressing stray radiation
Publication Date: 2021.10.05 INFINEON TECHNOLOGIES AG
  • US11136237B2 patent drawing
  • US11136237B2 patent drawing
  • US11136237B2 patent drawing

AI summary

A device for suppressing stray radiation includes a Micro-ElectroMechanical System (MEMS) sensor module and a conductive cage structure. The conductive cage structure may enclose the MEMS sensor module in order to suppress penetration of stray electromagnetic radiation with a stray wavelength λo into the conductive cage structure, and the conductive cage structure may be arranged to be thermally insulated from the MEMS sensor module. The device may also include a connecting line. The connecting line may be connected to the MEMS sensor module and fed through the conductive cage structure by a capacitive element.