MEMS Sensor Intermediate Movable Member Vibration Stability
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Solution Overview
Problem
Existing sensors using MEMS elements face challenges in achieving stable vibration for accurate detection, particularly when subjected to external forces like angular velocity, leading to unstable vibration and reduced precision.
Innovation Solution
Incorporating a first intermediate movable member between the movable member and the fixed portion, which alleviates the vibration force and maintains stable vibration by providing additional support through a meandering structure, thereby enhancing detection accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a simple connect portion is used between the movable member and fixed portion, then the device complexity is reduced, but the vibration stability deteriorates under external forces
Solution Approach 1:
The connect portion is divided into multiple segments including a first intermediate connect portion and a first connect portion, with a first intermediate movable member positioned between them. This segmentation allows each segment to independently manage different aspects of vibration, improving overall vibration stability while maintaining reasonable structural complexity.
Solution Approach 2:
A first intermediate movable member is introduced as an intermediary element between the fixed portion and the movable member. This intermediate member acts as a mediator that absorbs and alleviates vibration forces, preventing direct transmission of unstable vibrations from the movable member to the fixed portion, thereby enhancing vibration stability.
2Measurement precision
If additional intermediate members are added to improve vibration stability, then the detection precision is improved, but the device complexity increases
Solution Approach 1:
The connection structure is segmented into multiple functional portions (first intermediate connect portion, first connect portion) with clearly defined roles. This segmentation enables precise control over vibration characteristics, improving detection precision while keeping the overall structure manageable through systematic division of functions.
Solution Approach 2:
The first intermediate movable member serves as a mediator that specifically targets vibration instability issues. By introducing this single intermediate element with carefully designed properties, the system achieves improved detection precision without proportionally increasing overall device complexity.
3Stability of the object's composition
If the connect portion is made more rigid to reduce vibration, then the vibration stability is improved, but the manufacturing precision requirements increase
Solution Approach 1:
Instead of using a purely rigid connect portion, the invention employs a dynamic structure with intermediate movable members that can adapt to vibration forces. This dynamic approach achieves vibration stability through controlled movement and force distribution rather than rigid constraints, reducing the stringency of manufacturing precision requirements.
Solution Approach 2:
The first intermediate movable member acts as a buffer that absorbs manufacturing tolerances and variations. By introducing this compliant intermediate element, the system achieves vibration stability without requiring extremely tight manufacturing precision, as the intermediate member can accommodate minor dimensional variations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for more stable and precise vibration detection, improving the overall characteristics of the sensor by suppressing unnecessary vibration transmission and maintaining stability even when integrated into a housing.
Implementation Method 1
a first intermediate connect portion supported by the first fixed portion... a meandering structure... alleviates the vibration force and maintains stable vibration
Data Source
AI summary
According to one embodiment, a sensor includes an element section. The element section includes a base, a first fixed portion, a first intermediate connect portion, a first intermediate movable member, a first connect portion, a first movable member, and a first fixed electrode. The first fixed portion is fixed to the base. The first intermediate connect portion is supported by the first fixed portion. The first intermediate movable member is connected to the first intermediate connect portion. The first connect portion is connected to the first intermediate movable member. The first movable member is supported by the first connect portion. The first movable member includes a first movable electrode. The first fixed electrode is fixed to the base and faces the first movable electrode.