MEMS Sensor Sampling with Pseudo-Random Jitter Clock
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Solution Overview
Problem
MEMS-based sensors often exhibit underdamped responses due to mechanical resonances, leading to measurement errors caused by ringing noise, which existing technologies struggle to effectively mitigate.
Innovation Solution
The implementation of a measurement system that generates a pseudo-random jitter sampling clock signal to sample the response signal from MEMS sensors, combining multiple digital samples to suppress wideband ringing noise, and using an array of MEMS sensors with varying dimensions to reduce resonant interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional sampling methods are used to measure MEMS sensor response, then the measurement process is simple, but ringing noise from mechanical resonances causes measurement errors
Solution Approach 1:
The patent applies dynamics by making the sampling clock frequency variable rather than fixed. The sampling frequency is dynamically adjusted to be non-integer multiples away from the mechanical resonant frequency of the MEMS device, converting a static sampling system into a dynamic one that adapts to avoid resonance-induced ringing noise.
Solution Approach 2:
The patent changes the sampling frequency parameter to resolve the measurement accuracy problem. By adjusting the sampling frequency to specific values that are non-integer multiples away from the resonant frequency, the system eliminates ringing noise without requiring complex hardware modifications.
2Measurement precision
If the sampling frequency is fixed, then the sampling system is simple to implement, but it cannot avoid resonant frequencies that cause measurement errors
Solution Approach 1:
The system transitions from a fixed sampling frequency to a dynamic sampling frequency that can adapt to different resonant conditions. The sampling frequency is adjusted based on the specific MEMS device characteristics to ensure it remains non-integer multiples away from resonant frequencies.
Solution Approach 2:
The sampling frequency parameter is changed from a fixed value to a variable value that can be tuned. This allows the system to adapt to different MEMS devices with different resonant frequencies while maintaining measurement accuracy.
3Measurement precision
If multiple sampling points are used to reduce ringing noise, then measurement accuracy improves, but the processing complexity increases
Solution Approach 1:
The patent applies preliminary action by pre-calculating and storing optimal sampling frequency values that are non-integer multiples away from resonant frequencies. During measurement, the system simply selects from these pre-determined frequencies rather than performing complex real-time calculations, reducing processing time.
Solution Approach 2:
The patent replaces complex signal processing methods with a simpler frequency selection approach. Instead of using multiple sampling points and complex filtering to reduce ringing noise, the system substitutes this with a straightforward frequency selection strategy that achieves the same goal with less processing.
Data Source
AI summary
A measurement method includes generating, by a sensor, a response signal in response to an excitation signal. The method also includes generating a sampling clock signal in accordance with a pseudo-random jitter, and sampling the response signal in accordance with the sampling clock signal to determine a plurality of digital samples. The method also includes combining the plurality of digital samples to form a measurement sample.