MEMS Sensor Movable Portion Segmentation for Vibration Stability
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Solution Overview
Problem
Existing sensors with MEMS structures face challenges in improving their characteristics, such as mechanical strength and vibration stability, which affect their sensitivity and accuracy in detecting external forces.
Innovation Solution
The sensor design includes a base with a fixed and movable portion, featuring a first gap between the base and the movable portion, and a configuration of annular portions, connect portions, and radial structures that allow for controlled vibration and enhanced mechanical strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the movable portion is made more rigid to improve mechanical strength, then structural stability is improved, but vibration sensitivity deteriorates
Solution Approach 1:
The movable portion is divided into multiple annular portions (first, second, third annular portions) connected by connect portions. This segmentation allows each annular portion to vibrate independently while maintaining overall structural integrity, resolving the contradiction between mechanical strength and vibration sensitivity.
Solution Approach 2:
Different regions of the movable portion have different structural characteristics - the annular portions provide vibration sensitivity while the connect portions and radial structures provide mechanical strength. This local differentiation allows simultaneous optimization of both strength and sensitivity.
2Measurement precision
If the gap between the base and movable portion is reduced to improve detection sensitivity, then measurement precision is improved, but mechanical strength deteriorates
Solution Approach 1:
The movable portion is segmented into multiple annular portions, allowing the gap to be optimized for sensitivity while the distributed structure maintains mechanical strength. The segmentation enables the sensor to achieve high sensitivity without compromising structural integrity.
3Ease of manufacture
If the movable portion structure is simplified to reduce device complexity, then ease of manufacture is improved, but vibration stability deteriorates
Solution Approach 1:
The movable portion is divided into multiple annular portions connected by simple connect portions, creating a modular structure that is both easy to manufacture and vibrationally stable. The repetitive annular pattern simplifies fabrication while the multi-segment design ensures vibration stability.
Solution Approach 2:
The annular portions have curved geometries that naturally distribute stress and maintain vibration stability. The curved structures are easier to manufacture using standard MEMS processes while providing superior vibration characteristics compared to straight-edged designs.
Data Source
AI summary
According to one embodiment, a sensor includes a base including a first face, a fixed portion fixed to the first face, and a movable portion supported by the fixed portion. The movable portion includes a plurality of annular portions, a plurality of connect portions, and a first radial structure. Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first face. The plurality of connect portion extend along a radial direction. One of the plurality of connect portions connects two of the plurality of annular portions to each other. The plurality of annular portions include a first annular portion and a second annular portion. The first radial structure is connected to the first annular portion. The first radial structure extends toward the second annular portion along a first radial direction.