MEMS Sensor Noise Suppression via Segmented Regions
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Solution Overview
Problem
Existing sensors with MEMS structures face challenges in improving their characteristics, such as sensitivity and noise suppression, especially when miniaturized.
Innovation Solution
The sensor design includes a base with a fixed inner structure, a movable portion supported by a fixed portion, and a conductive portion with specific region lengths and connect regions, which allows for efficient electrical connection and reduced noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the sensor size is reduced for miniaturization, then the device becomes more compact and portable, but noise increases and detection accuracy deteriorates
Solution Approach 1:
The sensor is divided into distinct functional regions: a first region for detection and a second region for noise suppression. This segmentation allows each region to be optimized independently, enabling the overall sensor to maintain high detection accuracy even when miniaturized.
Solution Approach 2:
Different regions of the sensor are assigned different functional qualities - the first region is optimized for signal detection while the second region is optimized for noise suppression. This local differentiation of functional properties allows the sensor to achieve both compact size and high detection accuracy by ensuring that noise suppression functions are performed in dedicated regions.
2Volume of moving object
If the sensor size is reduced for miniaturization, then the device becomes more compact, but noise suppression capability deteriorates
Solution Approach 1:
The sensor structure is segmented into a first region and a second region, where the second region is specifically dedicated to noise suppression. This segmentation ensures that noise suppression functionality is preserved even when the overall sensor size is reduced for miniaturization.
Solution Approach 2:
The sensor employs local quality differentiation by creating a second region with specific properties optimized for noise suppression. This localized functional differentiation allows the sensor to maintain effective noise suppression capability despite reduction in overall device size.
3Volume of moving object
If the sensor is miniaturized, then device complexity is reduced and manufacturing is easier, but detection stability deteriorates
Solution Approach 1:
By segmenting the sensor into functionally distinct first and second regions, the design achieves stable detection performance in a compact form factor. The first region maintains detection functionality while the second region provides stability through noise suppression, allowing miniaturization without sacrificing reliability.
Solution Approach 2:
The sensor achieves detection stability in a miniaturized form by assigning different local qualities to different regions. The second region is specifically configured to provide stable operation and noise suppression, compensating for the reduced overall size and maintaining reliable detection performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables stable and accurate detection even at reduced sizes, suppressing noise and ensuring high detection accuracy.
Implementation Method 1
a plurality of fixed electrodes fixed to the first face... A first gap is provided between the first face and the movable portion
Data Source
AI summary
According to one embodiment, a sensor includes a base including a first face, an inner structure fixed to the first face, a fixed portion fixed to the first face, a movable portion supported by the fixed portion, a plurality of fixed electrodes fixed to the first face, and a plurality of connect members. A first gap is provided between the first face and the movable portion. The movable portion includes a first annular portion and a first connect portion. The plurality of fixed electrodes include a first fixed electrode and a first opposing fixed electrode that face the first annular portion. The inner structure includes a first conductive portion. The first conductive portion includes a first region and a first opposing region. The plurality of connect members include a first connect member and a first opposing connect member.