MEMS Sensor Support Layout for Stable Resistance Detection

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Solution Overview

Problem

Existing sensors using MEMS elements face challenges in maintaining stable characteristics and efficient detection accuracy due to unsupported or inadequately supported element portions, leading to unstable signal outputs.

Innovation Solution

A sensor design that includes a base with multiple fixed and connecting portions supporting element portions, allowing for stable support through multiple connecting paths for current flow, reducing temperature differences and enabling accurate resistance-based detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If element portions are inadequately supported, then device complexity is reduced, but measurement precision deteriorates due to unstable signal outputs

Engineering Contradiction:

Improvesupport structure complexityVSAvoiddetection accuracy

Core Design Contradiction:

Device complexityVSMeasurement precision

Solution Approach 1:

The support structure is segmented into multiple connecting portions (first connecting portion, second connecting portion, third connecting portion, fourth connecting portion) that are distributed across different fixed portions. This segmentation provides stable support for the element portions while maintaining a relatively simple overall structure, resolving the contradiction between support adequacy and structural complexity.

Inventive Principle:

Principle #1Segmentation

2Measurement precision

If multiple connecting portions are used to support element portions, then measurement precision is improved through stable support, but device complexity increases

Engineering Contradiction:

Improvesignal stabilityVSAvoidconnecting portions structure

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

Multiple connecting portions are merged into a unified support system where the first, second, third, and fourth connecting portions work together to support the element portions. This merging approach distributes the support function across multiple pathways, enhancing signal stability while preventing any single connecting portion from becoming a bottleneck or failure point.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The connecting portions serve multiple functions: they provide mechanical support for the element portions, establish electrical current pathways, and contribute to thermal management. This multi-functionality reduces the need for separate dedicated components, thereby limiting the increase in device complexity despite the presence of multiple connecting portions.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Measurement precision

If current flows through multiple connecting portions, then measurement precision is enhanced through stable current paths, but use of energy increases

Engineering Contradiction:

Improvecurrent path stabilityVSAvoidcurrent consumption

Core Design Contradiction:

Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The patent creates multiple parallel current pathways through the first, second, third, and fourth connecting portions. These pathways act as copies of each other, providing redundant routes for current flow. This redundancy ensures stable current paths for measurement while allowing the system to optimize energy distribution across the parallel paths.

Inventive Principle:

Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design enhances the stability and accuracy of sensor elements by providing stable support, reducing footprint, and improving detection precision through shared fixed portions and multiple connecting paths.

Implementation Method 1

the first connecting portion and the second connecting portion are configured to pass a first current flowing through the first conductive member

Methodology Applied

Scientific EffectElectrical current flow: Conduction (electrical)

Implementation Method 2

the first connecting portion is configured to pass a first other current flowing through the first other conductive member

Methodology Applied

Scientific EffectElectrical current flow: Conduction (electrical)

Implementation Method 3

the first other connecting portion is configured to pass a second current flowing through the second conductive member

Methodology Applied

Scientific EffectElectrical current flow: Conduction (electrical)

Data Source

PatentUS20260009758A1sensor

Publication Date: 2026.01.08 KK TOSHIBA

AI summary

According to one embodiment, a sensor includes a base, first to fourth fixed portions fixed to the base, a first element portion including a first conductive member and a first other conductive member, a second element portion including a second conductive member, first to fourth connecting portions, and first and fourth other connecting portions. The first connecting portion and the second connecting portion are configured to pass a first current flowing through the first conductive member. The first connecting portion is configured to pass a first other current flowing through the first other conductive member. The first other connecting portion is configured to pass a second current flowing through the second conductive member.