MEMS Sensor Support Structure for Stable Resonance Detection
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Solution Overview
Problem
Existing sensors using MEMS structures face challenges in achieving stable detection due to instability in the connection structures, leading to inaccurate detection results.
Innovation Solution
The sensor design includes a first member with a support structure that connects to a base body through a series of levers and beams, stabilizing the connection structure by linking it to additional support structures, enhancing the stability of the detection mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a simple connection structure is used between the base body and the first member, then the device complexity is reduced, but the stability of the connection structure deteriorates
Solution Approach 1:
The connection structure is divided into multiple segments: the first member, the first beam, the first connection structure, and the support portion. Each segment performs a specific function and is connected through defined interfaces, allowing the system to achieve stability through distributed structural elements rather than a single complex connection.
Solution Approach 2:
The first beam extends in a second direction that crosses the first direction (from base body to support portion), adding a dimensional element to the connection. This cross-directional beam provides additional structural support and stability without increasing the complexity of individual connection components.
2Reliability
If additional support structures and connection elements are added to stabilize the first member, then the stability of the detection mechanism is improved, but the device complexity increases
Solution Approach 1:
Multiple structural elements (first member, first beam, first connection structure, support portion) are merged into a single integrated assembly that works together to provide stable detection. The elements are positioned and connected in a coordinated manner to achieve overall system stability without requiring separate stabilization mechanisms.
Solution Approach 2:
Different regions of the structure have specialized functions: the first member contains a movable region for detection, the first beam provides structural support, the first connection structure enables controlled movement, and the support portion anchors the assembly. Each local region is optimized for its specific function, contributing to overall detection stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves detection accuracy by stabilizing the connection structures, allowing for more precise detection of external forces such as acceleration through changes in resonance frequency.
Implementation Method 1
allowing for more precise detection of external forces such as acceleration through changes in resonance frequency
Data Source
AI summary
According to one embodiment, a sensor includes a base body, a support portion fixed to the base body, and a first member supported by the support portion. A gap is provided between the base body and a part of the first member. The first member includes a supported region, a first movable region, a first structure, a first support structure, a first connection structure, a first connect portion, and a first beam. The support portion is located between the base body and the supported region in a first direction from the base body to the support portion. The first beam extends along a second direction crossing the first direction. A first beam position of the first beam is located between a first movable region position of the first movable region and a support portion position of the support portion in the second direction.