MEMS Shear Sensor Interface Circuit for Time-Resolved Flow Measurement

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Solution Overview

Problem

Current research tools lack the capability for real-time, time-resolved characterization of complex three-dimensional wall-bounded flow fields, particularly the fluctuating wall shear stress field, which is essential for optimizing fluidic systems and reducing skin friction drag in aerodynamics and hydrodynamics.

Innovation Solution

A differential capacitive MEMS shear stress sensor system with interface circuitry and appropriate packaging is developed, enabling real-time, vector measurement of wall shear stress, capable of operating in wind tunnel environments and providing direct measurements of both AC and DC baseband shear stress values with spatial and temporal accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a MEMS shear stress sensor is used for direct measurement of wall shear stress, then measurement precision is improved, but device complexity and packaging requirements increase

Engineering Contradiction:
Improvewall shear stress measurement precisionVSAvoidsensor packaging complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines the MEMS shear stress sensor, interface circuitry, and packaging into a single integrated cylindrical tube structure. The sensor is mounted on a flat plate within the tube, and the interface circuitry is integrated to provide real-time signal processing, merging multiple components into one unified system that reduces overall complexity while maintaining measurement precision

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The cylindrical tube structure serves multiple functions: it houses the MEMS sensor, provides structural support, enables wind tunnel installation, and accommodates the interface circuitry. This multi-functional design reduces the need for separate components and simplifies the overall system packaging

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If a MEMS shear stress sensor is developed for wind tunnel environments, then adaptability is improved, but reliability under operational conditions deteriorates

Engineering Contradiction:
Improvewind tunnel environment adaptabilityVSAvoidsensor operational reliability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent implements robust packaging and protective structures before the sensor is exposed to wind tunnel conditions. The cylindrical tube provides environmental protection, and the interface circuitry is designed with signal conditioning capabilities that compensate for potential operational variations, cushioning the sensor against harsh conditions before they can cause reliability issues

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The interface circuitry incorporates real-time signal processing and feedback mechanisms that monitor sensor output and compensate for environmental variations in wind tunnel conditions. This feedback system maintains reliability by continuously adjusting for changes in operational environment

Inventive Principle:
Principle #23Feedback

3Productivity

If real-time acquisition of wall shear stress field is implemented, then productivity is improved, but device complexity increases

Engineering Contradiction:
Improvereal-time data acquisition capabilityVSAvoidinterface circuitry complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent merges the sensor element with integrated interface circuitry that performs real-time signal processing, modulation, and demodulation functions within the same packaging. This combination enables real-time wall shear stress field acquisition while reducing the complexity that would result from separate external processing systems

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively detects and predicts flow separation, enhances the design of aerodynamic and hydrodynamic surfaces by providing direct measurements of mean and dynamic wall shear stress, reducing drag and improving fuel efficiency in multi-billion dollar consumer markets.

Implementation Method 1

differential capacitive MEMS shear stress sensor

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentUS10859448B2MEMS capacitive shear sensor system having an interface circuit
Publication Date: 2020.12.08 UNIV OF FLORIDA RESEARCH FOUNDATION INC
  • US10859448B2 patent drawing
  • US10859448B2 patent drawing
  • US10859448B2 patent drawing

AI summary

A sensor system comprising a Micro-Electro-Mechanical Systems (MEMS)-based capacitive floating element shear stress sensor, the associated packaging, and the interface circuitry required for operation as an instrumentation-grade sensing system is disclosed herein. One implementation of the interface circuitry is an analog synchronous modulation/demodulation scheme enabling time-resolved measurements of both mean and dynamic wall shear stress events, where a modulation section couples to the sensor for sensing wall shear stress at the surface of an object in a fluid and generates at least one bias signal from the sensor output signal. In response to the bias signal, a demodulation control circuit adjusts the phase of the bias signal and generates a demodulation control signal from the phase adjusted signal. Consequently, in response to the demodulation control signal, a demodulation section synchronizes the rectification of the sensor output signal, while the phase information is maintained.