MEMS EMI Shield Cap Using Conductive Adhesive and Paint

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Solution Overview

Problem

Existing electromagnetic interference (EMI) shield caps for microelectromechanical systems (MEMS) devices face adhesive failure due to contamination and inadequate surface finishing, leading to poor bonding between the adhesive layer and copper foil, which results in ineffective shielding.

Innovation Solution

The EMI shield cap design features a first and second layer of polymeric material with an aperture forming a cavity, joined by an adhesive layer and covered with electrically continuous conductive paint, where increased pressure during lamination ensures proper bonding and the adhesive forms a bead around the back wall, enhancing the adhesion and conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If copper plating is used to line the cavity and bond BT layers, then electrical continuity and EMI shielding are achieved, but manufacturing complexity and cost increase due to multiple plating layers and surface preparation requirements

Engineering Contradiction:
ImproveEMI shielding effectivenessVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts and removes the complex copper plating process entirely, replacing it with a simple conductive adhesive application. The copper plating layers (copper, nickel, gold) and associated electroplating equipment, process control, and surface preparation steps are completely taken out of the manufacturing system, achieving EMI shielding through the conductive adhesive alone.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces expensive, multi-layer copper plating with a inexpensive conductive adhesive that can be applied directly to the BT layer surfaces. This disposable-like approach uses a simple, single-layer conductive material instead of expensive, multi-layer metal plating, significantly reducing material and processing costs while maintaining EMI shielding functionality.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

2Reliability

If copper plating is applied to ensure electrical continuity, then EMI shielding is effective, but manufacturing time and productivity are reduced due to sequential electroplating of multiple layers

Engineering Contradiction:
Improveelectrical continuityVSAvoidmanufacturing cycle time
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The conductive adhesive is applied to the BT layer surfaces before the layers are assembled and before any EMI shielding effectiveness is tested. This preliminary application of the conductive material ensures electrical continuity is established from the outset, eliminating the need for subsequent plating operations and allowing parallel processing of multiple components.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent replaces the electrochemical plating system (requiring electrolyte baths, power supplies, and complex process control) with a simple mechanical adhesive application process. The conductive adhesive is applied using conventional coating or dispensing methods, substituting complex electrochemical machinery with simple mechanical application equipment, thereby dramatically reducing manufacturing cycle time.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Strength

If adhesive layer is made thin to allow copper plating to bridge gaps, then bonding strength is maintained, but risk of plating discontinuity increases leading to EMI shielding failure

Engineering Contradiction:
Improveadhesive bond strengthVSAvoidplating continuity
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The conductive adhesive serves as an intermediary material that simultaneously provides both bonding and EMI shielding functions. Instead of relying on thin copper plating to bridge gaps between BT layers, the conductive adhesive acts as the primary bonding agent and EMI shield, eliminating the gap-bridging requirement and ensuring continuous electrical coverage without the risks associated with thin plating.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent merges the adhesive bonding function and the EMI shielding function into a single material - the conductive adhesive. Rather than using separate adhesive and copper plating layers, the conductive adhesive combines both functions, ensuring that the same material provides both mechanical bonding and continuous electrical coverage for EMI shielding, thereby eliminating the reliability risk of plating discontinuity.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design effectively prevents delamination and ensures adequate electromagnetic shielding, meeting mechanical strength and thermal cycle standards without the need for copper plating, while maintaining feature preservation and conductivity.

Implementation Method 1

an electrically continuous layer of conductive paint covers the back and side walls of the cavity and exposed portions of the adhesive

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

The first and second layers are joined by an adhesive positioned between the layers

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS8987871B2Cap for a microelectromechanical system device with electromagnetic shielding, and method of manufacture
Publication Date: 2015.03.24 STMICROELECTRONICS INT NV
  • US8987871B2 patent drawing
  • US8987871B2 patent drawing
  • US8987871B2 patent drawing

AI summary

A cap for a microelectromechanical system device includes a first layer of, e.g., Bismaleimide Triazine (BT) resin material in which a through-aperture is formed, laminated to a second layer of BT resin material that closes the aperture in the first layer, forming a cavity. The first and second layers are laminated with a thermosetting adhesive that is sufficiently thick to encapsulate particles that may remain from a routing operation for forming the apertures. The interior of the cavity, including exposed portions of the adhesive, and the exposed face of the first layer are coated with an electrically conductive paint. The cap is adhered to a substrate over the MEMS device using an electrically conductive adhesive, which couples the conductive paint layer to a ground plane of the substrate. The layer of conductive paint serves as a shield to prevent or reduce electromagnetic interference acting on the MEMS device.