MEMS Shield Frame for Electrical Disturbance Isolation
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Solution Overview
Problem
Microelectromechanical systems (MEMS) face challenges in accurate measurement due to internal and external electromagnetic or electrostatic field interactions, which can cause errors in mechanical function induction, control, and detection at miniaturized dimensions.
Innovation Solution
A microelectromechanical structure with a mobile element and a rotor suspended to a support, a first frame anchored to the support, and a second frame electrically isolated from the first frame, both galvanically coupled to the same electric potential, minimizing internal and external electrical disturbances through a shield frame that separates detection axes and provides efficient gas damping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If electrical components are used to induce, control and detect mechanical functions in miniaturized MEMS dimensions, then the device can perform mechanical functions at micron-scale dimensions, but internal electromagnetic or electrostatic fields from these components may unintentionally interact and cause measurement errors
Solution Approach 1:
A shield frame is introduced as an intermediary element between the electrical components and the mobile element. The shield frame is electrically connected to the rotor, creating a protective barrier that mediates the electromagnetic interactions. This intermediary structure prevents direct unwanted field interactions while allowing the device to maintain its miniaturized dimensions and measurement capabilities.
Solution Approach 2:
The shield frame creates counteracting electromagnetic fields to neutralize the unwanted internal electromagnetic or electrostatic field interactions. By establishing an opposing field configuration through the shield frame connected to the rotor, the system counterbalances the harmful field interactions that would otherwise cause measurement errors in the miniaturized device.
2Ease of operation
If electrical components are used to induce, control and detect mechanical functions, then the device can operate with electrical control, but the mechanical functions may be disturbed by external electromagnetic or electrostatic fields
Solution Approach 1:
The shield frame serves as a protective intermediary between external electromagnetic fields and the mobile element. By being electrically connected to the rotor and positioned around the mobile element, the shield frame mediates external field interactions, allowing electrical control to function while blocking harmful external electromagnetic or electrostatic disturbances that would otherwise disrupt operation.
Solution Approach 2:
The shield frame converts the potentially harmful effect of electrical connectivity into a protective mechanism. The same electrical components that enable control also create the shield frame's electrical connection to the rotor, which then becomes a protective feature that blocks external electromagnetic interference, turning the source of potential harm into a protective benefit.
3Device complexity
If a single frame structure is used to circumscribe the mobile element, then the device structure is simpler, but the device is more prone to electrical disturbances from both internal and external sources
Solution Approach 1:
The frame structure is segmented into two distinct frames: a first frame and a second frame. The second frame is positioned between the mobile element and the first frame, creating a segmented protective structure. This segmentation allows each frame to serve specific functions - the first frame provides structural support while the second frame (shield frame) provides electrical protection, reducing overall susceptibility to electrical disturbances without excessive complexity.
Solution Approach 2:
The frames are arranged in a nested configuration where the second frame (shield frame) is positioned between the mobile element and the first frame, creating a nested protective structure. This nested arrangement allows the shield frame to be embedded within the overall frame structure, providing enhanced protection against electrical disturbances while maintaining a compact and relatively simple overall device geometry.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables accurate and robust measurements by minimizing errors from electrical disturbances and maintaining signal integrity across detection axes, even under external shocks, while maintaining efficient motion limiting and damping mechanisms.
Implementation Method 1
a second frame anchored to the support and circumscribing the mobile element between the mobile element and the first frame, electrically isolated from the first frame. The rotor and the second frame are galvanically coupled to have a same electric potential.
Implementation Method 2
provides efficient gas damping
Data Source
AI summary
A robust microelectromechanical structure that is less prone to internal or external electrical disturbances. The structure includes a mobile element with a rotor suspended to a support, a first frame anchored to the support and circumscribing the mobile element, and a second frame anchored to the support and circumscribing the mobile element between the mobile element and the first frame, electrically isolated from the first frame. The rotor and the second frame are galvanically coupled to have a same electric potential.