MEMS Shock Cushion Spring for Actuator Impact Mitigation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Microelectromechanical systems (MEMS) structures are prone to damage from physical shocks due to their miniaturization, as conventional methods to enhance strength, such as using thicker materials or stronger materials, compromise their power and area efficiency, making them more susceptible to damage.
Innovation Solution
A shock impact mitigation system is introduced, featuring a shock cushion spring situated between moving structures, with a spine and shock stop configuration that includes a compliant member to absorb shocks and protect the MEMS structures from damage, allowing for more compact and powerful actuator implementations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If thicker structures or stronger materials are used to enhance MEMS structure strength, then shock resistance is improved, but the area available for MEMS actuator structures is reduced and overall weight increases
Solution Approach 1:
The MEMS structure is segmented into multiple components: a primary structure, a shock cushion spring, and a shock stop. This segmentation allows the shock absorption function to be separated from the actuator structure, enabling thin actuator structures while maintaining shock resistance through the dedicated shock cushioning components.
Solution Approach 2:
A shock cushion spring is positioned between the movable structure and the shock stop to provide beforehand cushioning. This spring absorbs shock forces before they reach the fragile MEMS actuator structures, protecting them from damage without requiring the structures themselves to be thicker or stronger.
2Strength
If thicker structures or stronger materials are used to enhance MEMS structure strength, then shock resistance is improved, but overall weight increases resulting in weaker MEMS actuators
Solution Approach 1:
The shock resistance function is segmented into a separate shock cushioning system (spring and shock stop) rather than being integrated into the actuator structures themselves. This allows the actuator structures to remain lightweight while the dedicated shock cushioning components provide the necessary protection.
Solution Approach 2:
The shock cushion spring provides beforehand cushioning by absorbing shock forces before they reach the MEMS structures. This approach protects the structures without requiring them to be heavier, as the protection is provided by a separate compliant component rather than by increasing the mass of the actuator structures.
3Strength
If conventional shock protection methods are used, then shock resistance is improved, but device complexity increases
Solution Approach 1:
The shock cushion spring functions as a flexible element that absorbs shock forces. This flexible component provides effective shock protection with a simple, elegant structure that integrates seamlessly into the MEMS device without adding significant complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces the risk of damage to MEMS structures by absorbing shocks, enabling more reliable and compact MEMS actuators with increased power and variability while maintaining a smaller form factor.
Implementation Method 1
a shock cushion spring fixed relative to the spine tip and situated substantially between the spine tip and the shock stop surface, where the shock cushion spring is adapted to protect the spine tip from contact with the shock stop surface
Data Source
AI summary
Techniques are disclosed for systems and methods to provide shock impact mitigation for MEMS structures. A MEMS structure may include one or more actuators. An actuator may include a first frame having a spine, where the spine includes a body and a tip. The actuator may include a second frame connected to the first frame and including a shock stop, where the shock stop includes a surface in proximity to the spine tip. An actuator may include a shock cushion spring fixed relative to the spine tip and situated substantially between the spine tip and the shock stop surface, where the shock cushion spring is adapted to protect the spine tip from contact with the shock stop surface.