MEMS Shutter Ground Electrode Dissipates Static Charge
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Solution Overview
Problem
Static electricity generated during the enclosure of an insulating liquid in MEMS display devices causes the MEMS shutter to adhere to or deform, preventing proper positioning and functionality.
Innovation Solution
A ground electrode is formed along the injection opening and edge of the substrates to dissipate static electricity, ensuring the MEMS shutter remains in a proper floating state by connecting it to an external ground potential.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If insulating liquid is injected into the area between substrates to prevent adhesion, then the springs can move the MEMS shutter, but static electricity is generated by friction causing the MEMS shutter to adhere to the substrate
Solution Approach 1:
The patent converts the harmful static electricity generated by friction into a beneficial effect by using it to drive the MEMS shutter operation. The friction between the insulating liquid and the injected air stream generates static electricity that is then utilized to charge the MEMS shutter, enabling it to open and close effectively. This transforms the previously problematic static electricity into the driving force for the shutter mechanism.
Solution Approach 2:
The patent introduces air as an intermediary substance injected through the insulating liquid. This air stream serves multiple functions: it generates static electricity through friction with the liquid, creates a flow that prevents the liquid from directly contacting and deforming the springs, and maintains the MEMS shutter in a floating state. The air acts as a mediator between the insulating liquid and the MEMS components, enabling operation while preventing direct harmful interactions.
2Reliability
If the insulating liquid is enclosed to prevent spring adhesion, then the springs can function, but the MEMS shutter cannot be kept in a proper floating state and adheres to the substrate
Solution Approach 1:
The patent maintains continuous injection of air through the insulating liquid during the entire operation of the MEMS display device. This continuous air stream continuously generates static electricity and maintains the floating state of the MEMS shutter, ensuring uninterrupted functionality. The persistent action of air injection prevents the shutter from adhering to the substrate throughout the device's operation, maintaining both spring function and shutter positioning accuracy.
3Ease of manufacture
If static electricity is generated by friction during insulating liquid enclosure, then the insulating liquid can be injected, but the MEMS shutter adheres to the substrate or deforms
Solution Approach 1:
The patent introduces air as an intermediary substance injected through the insulating liquid. This air stream serves multiple functions: it generates static electricity through friction with the liquid, creates a flow that prevents the liquid from directly contacting and deforming the springs, and maintains the MEMS shutter in a floating state. The air acts as a mediator between the insulating liquid and the MEMS components, enabling operation while preventing direct harmful interactions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The ground electrode effectively removes static electricity, preventing the MEMS shutter from adhering to the substrates and maintaining its operational position, thus enhancing the manufacturing process and device performance.
Implementation Method 1
A ground electrode for covering at least a part of an inner surface of the injection opening are provided
Implementation Method 2
static electricity is generated by friction of the liquid
Data Source
AI summary
A display device and a method for manufacturing the same, for discharging static electricity generated in the manufacturing process of a display device using a mechanical shutter and thus preventing the mechanical shutter from being deformed by the static electricity are provided. The display device includes a TFT substrate having thin film transistors thereon respectively provided with a plurality of mechanical shutters located in a matrix and also having terminals thereon for supplying a signal to the thin film transistors from outside; and a counter substrate joined with the TFT substrate. Along at least one of an edge of the TFT substrate and an edge of the counter substrate, an injection opening for injecting an insulating liquid into an area between the TFT substrate and the counter substrate and a ground electrode for covering at least a part of an inner surface of the injection opening are provided.