MEMS Actuator Signal Path Impedance Tuning

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Solution Overview

Problem

Existing RF systems in space-constrained environments, such as millimeter wave seekers, face challenges in dynamically tuning broadband and frequency-agile waveforms due to limitations in altering impedance and structural changes in signal paths.

Innovation Solution

The method involves establishing an RF response in a signal path and using a MEMS actuator to structurally alter the path, dynamically changing impedance to modify the RF response, employing CMOS processing and conductive segments that can move within a dielectric to adjust coupling coefficients and electrical parameters.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If switched banks of RF devices are used to support broadband and frequency agile waveforms, then the RF response can be modified, but the device size and complexity increase

Engineering Contradiction:
ImproveRF response modification capabilityVSAvoiddevice size
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent employs dynamically tunable devices that can change their electrical characteristics in real-time, allowing a single device to perform multiple RF functions. The movable conductive segments can be positioned at different locations within the dielectric to dynamically adjust coupling coefficients and modify RF response, replacing the need for multiple fixed RF devices

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The signal path structure is designed to perform multiple RF functions through a single integrated device. By moving conductive segments within the dielectric, the same physical structure can adjust coupling coefficients, modify impedance, and adapt RF response across different frequency ranges, making the device universal for broadband and frequency-agile applications

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If the signal path is structurally altered to dynamically change impedance, then the RF response can be modified, but the manufacturing complexity increases

Engineering Contradiction:
Improveimpedance tuning capabilityVSAvoidmanufacturing process
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The signal path is divided into segmented conductive structures separated by dielectric material. These segments can be independently positioned and controlled, allowing precise impedance tuning. The segmentation enables modular manufacturing where segments can be fabricated and then assembled or positioned using standard CMOS and post-CMOS processing techniques

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes physical parameters of the signal path by moving conductive segments to different positions within the dielectric. This movement alters coupling coefficients and impedance characteristics without requiring complex manufacturing processes. The same physical structure achieves parameter changes through reconfiguration rather than manufacturing different components

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables dynamic modification of RF responses, enhancing performance by reducing size and cost, and applying to various applications like missile seekers and communications systems, with empirical measurement of transfer functions for desired outcomes.

Implementation Method 1

controlling an actuator to structurally alter the signal path and dynamically change an impedance of the signal path

Methodology Applied
Scientific EffectMEMS actuator: Microelectromechanical Systems

Implementation Method 2

employing CMOS processing and conductive segments that can move within a dielectric to adjust coupling coefficients and electrical parameters

Methodology Applied
Scientific EffectCapacitance coupling: Capacitance

Data Source

PatentUS7639987B2Method and apparatus for modifying a radio frequency response
Publication Date: 2009.12.29 LOCKHEED MARTIN CORP
  • US7639987B2 patent drawing
  • US7639987B2 patent drawing
  • US7639987B2 patent drawing

AI summary

The present invention is directed to a method, and associated apparatus, for modifying a radio frequency (RF) response. An exemplary method includes establishing an RF response in a signal path of a device; and controlling an actuator to structurally alter the signal path and dynamically change an impedance of the signal path to alter the RF response.