MEMS Spring Design for Adjustable Stiffness

The spring is divided into multiple parallel elements (first, second, third elements) connected through bending portions, creating a segmented structure that distributes mechanical stress across multiple load paths. This segmentation prevents any single element from bearing the full stress load, reducing the risk of breakage under thermal and mechanical stress during manufacturing and operation.

The spring structure transitions from a conventional single-planar serpentine design to a multi-dimensional configuration with elements extending in different directions (first element in first direction, second element in second direction, third element in third direction). This dimensional diversification allows the spring to accommodate stress from multiple directions simultaneously, reducing susceptibility to sticking and breakage under varied manufacturing and operating conditions.

Different elements of the spring are configured with different orientations and properties (first element in first direction, second element in second direction, third element in third direction). This local differentiation allows each element to contribute differently to the overall spring constant, enabling precise control over the spring's mechanical characteristics while maintaining structural robustness. The bending portions connecting these elements provide localized flexibility that ensures smooth mirror tilting.

The spring functions as a composite mechanical structure combining multiple elements with different spatial orientations and mechanical properties. This composite configuration allows the spring to simultaneously achieve high reliability through distributed stress paths and the desired spring constants for smooth operation, as each element contributes differently to the overall mechanical response.

The spring is segmented into multiple independently configurable elements (first, second, third elements) with distinct orientations. This segmentation enables independent adjustment of spring constants in different directions by modifying individual element properties, while the overall segmented structure remains compatible with standard MEMS manufacturing processes, maintaining ease of manufacture.

The spring structure incorporates elements extending in multiple dimensions (first direction, second direction, third direction), allowing independent control of spring constants along different axes. This multi-dimensional configuration provides design flexibility for optimizing mirror tilting characteristics while maintaining a structure that can be manufactured using conventional MEMS techniques.