MEMS Movable Stage With Segmented Elastic Electrical Channels
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Solution Overview
Problem
MEMS devices with movable stages face challenges in maintaining stable electrical connections during movement, leading to potential fractures from repeated pulling and pushing forces, which can result in image blurring in applications like image stabilization in photography.
Innovation Solution
The MEMS device incorporates a substrate with anchors and a stage connected by elastic members, featuring first and second electrical channels and insulation layers to transmit signals and charges, ensuring no relative movement between electrical interconnections and the stage, thus preventing fractures and maintaining image sharpness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the stage moves during operation, then image stabilization function is achieved, but electrical interconnections may fracture due to repeated pulling and pushing forces
Solution Approach 1:
The electrical connection system is segmented into multiple independent channels (first electrical channel and second electrical channel) with separate functions. The first channel transmits sensing signals while the second channel transmits driving signals, allowing independent optimization of each channel's mechanical and electrical properties to prevent fracture during stage movement.
Solution Approach 2:
The elastic member acts as an intermediary between the movable stage and the fixed substrate, providing both mechanical support and electrical connection. The elastic member's flexible nature allows it to accommodate stage movement without transmitting excessive mechanical stress to the electrical interconnections, preventing fracture while maintaining reliable electrical contact.
2Area of stationary object
If electrical channels are placed close together for compact design, then device area is reduced, but electrical insulation may be compromised
Solution Approach 1:
An electrical insulation layer is introduced as an intermediary between the first electrical channel and the second electrical channel. This insulation layer prevents electrical breakdown and crosstalk between adjacent channels while allowing the channels to be positioned close together for compact device design.
Solution Approach 2:
The electrical insulation layer is applied locally between the electrical channels rather than throughout the entire device structure. This localized approach provides necessary electrical isolation while minimizing the overall device area and avoiding unnecessary material usage in regions where insulation is not required.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents image blurring and electrical interconnection fractures, ensuring stable operation of MEMS devices in image stabilization systems by maintaining secure signal transmission and electrostatic force generation.
Implementation Method 1
The elastic member includes at least one first electrical channel, a second electrical channel and an electrical insulation layer. The first electrical channel is configured to transmit a first electrical signal generated by the sensing chip... the second electrical channel is electrically connected with the electrode on the stage
Implementation Method 2
The electrical insulation layer is disposed between the first electrical channel and the second electrical channel
Implementation Method 3
The MEMS stage, working with an image sensor, to compensate for the displacement shift of the camera by controlling the movement of the MEMS stage
Data Source
AI summary
A MEMS device includes a substrate, at least one anchor disposed on the substrate, a movable stage, a sensing chip disposed on the movable stage, and at least one elastic member connected with the movable stage and the anchor. The movable stage includes at least one electrode and at least one conductive connecting layer. The sensing chip includes at least one electrical interconnection connected with the conductive connecting layer. The elastic member includes at least one first electrical channel, a second electrical channel and an electrical insulation layer disposed between the first electrical channel and the second electrical channel. The first electrical channel is electrically connected with the electrical interconnection, and the second electrical channel is electrically connected with the electrode.