MEMS Photonic Switch Self-Alignment via Integrated Photodiodes

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Solution Overview

Problem

MEMS photonic switches face limitations in switching speed due to complex control methods and residual modulation interference, especially in cascade configurations, which affects their widespread adoption.

Innovation Solution

Integration of photodiodes on MEMS mirrors and a control system that includes a mirror acquisition control unit and mirror driver to align mirrors precisely using optical control signals and detect beam spots, enabling faster and more accurate alignment and operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If complex control methods are used to achieve high port count and excellent optical properties, then switching speed deteriorates

Engineering Contradiction:
Improveswitching speedVSAvoidcontrol method complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The system uses photodiodes integrated on MEMS mirrors to detect beam spots and generate alignment signals automatically. The control system receives signals from photodiodes, determines beam landing spots, and computes correction vectors without external intervention, enabling self-alignment and improving switching speed

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system implements a feedback mechanism where photodiodes detect the beam spot position on each MEMS mirror, generate alignment signals, and the control system computes correction vectors to adjust mirror alignment. This closed-loop feedback enables rapid convergence and high-speed switching

Inventive Principle:
Principle #23Feedback

2Object-generated harmful factors

If complex control methods are used for mirror alignment, then residual modulation increases

Engineering Contradiction:
Improveresidual modulationVSAvoidalignment control complexity
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The system automatically detects beam spots using photodiodes and computes correction vectors to eliminate residual modulation. The self-aligning mechanism reduces manual intervention and minimizes residual modulation through automated feedback control

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system replaces manual mechanical alignment with an automated optical detection and control system. Photodiodes detect beam positions, and the control system computationally determines correction vectors, substituting mechanical adjustment with optical-electronic control to reduce residual modulation

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If photodiodes are integrated on MEMS mirrors, then alignment precision improves, but device complexity increases

Engineering Contradiction:
Improvealignment precisionVSAvoiddevice structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The system merges photodiodes directly onto MEMS mirror surfaces, combining detection and actuation functions into a single integrated component. This integration enables precise beam spot detection at the mirror location itself, improving alignment precision while reducing the number of separate components

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The MEMS mirrors serve dual functions: optical reflection and beam spot detection. By integrating photodiodes on the mirror surfaces, the mirrors become both actuators and sensors, enabling self-diagnosis and self-alignment capabilities

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances switching speed and reduces residual modulation, improving the scalability and performance of MEMS photonic switches by allowing for more efficient alignment and operation, particularly in high-port-count configurations.

Implementation Method 1

detecting, by a first photodiode having a first location on the second mirror of a second mirror array, a first beam spot of the first optical control beam to produce a first detected signal

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Implementation Method 2

reflecting, by the first mirror on a first minor array, the first optical control signal to produce a first optical control beam

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS9213142B2Device and method for micro-electro-mechanical-system photonic switch
Publication Date: 2015.12.15 HUAWEI TECH CO LTD
  • US9213142B2 patent drawing
  • US9213142B2 patent drawing
  • US9213142B2 patent drawing

AI summary

In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators and a first minor array optically coupled to the first plurality of collimators, where the first minor array includes a first plurality of minors, and where a first minor of the first plurality of minors includes a first plurality of photodiodes integrated on the first mirror.