MEMS Switch Arrays in Multi-Layer IC Packages

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Solution Overview

Problem

Conventional mobile wireless devices face power inefficiencies in their transmit and receive circuitry, which significantly impact battery life due to the power-hungry nature of these components, especially in communication systems using traditional RF devices with MEMS switches and LTCC technology.

Innovation Solution

The integration of MEMS switch arrays within a multi-layer package electrically coupled to an integrated circuit, where RF components are coupled via MEMS switch arrays that can be electrostatically or magnetically activated, reducing power consumption and improving efficiency by eliminating uncontrollable stray inductances and enhancing thermal conductance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If traditional RF devices with MEMS switches and LTCC technology are used, then wireless communication functionality is achieved, but power consumption is high and battery life is reduced

Engineering Contradiction:
Improvepower consumptionVSAvoidbattery life
Core Design Contradiction:
Use of energy by moving objectVSDuration of action of moving object

Solution Approach 1:

The patent combines MEMS switch arrays with RF components (inductors, capacitors, transformers) into a single integrated multi-layer package. This integration eliminates the need for separate discrete components and their associated interconnections, reducing overall power consumption while extending battery life in mobile wireless devices.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent implements a nested structure where MEMS switch arrays are embedded within the multi-layer package along with RF components. The MEMS switches are positioned between RF components to enable selective coupling, creating a compact nested arrangement that reduces power consumption through optimized signal paths and eliminated stray inductances.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Volume of moving object

If traditional RF devices with discrete components are used, then wireless communication is enabled, but device size and cost increase

Engineering Contradiction:
Improvedevice sizeVSAvoidmanufacturing complexity
Core Design Contradiction:
Volume of moving objectVSEase of manufacture

Solution Approach 1:

The patent merges multiple discrete RF components (inductors, capacitors, transformers, MEMS switches) into a single integrated multi-layer package. This consolidation significantly reduces device size while simplifying manufacturing through a unified fabrication process that eliminates the need to assemble multiple separate components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent transitions from a two-dimensional arrangement of discrete components to a three-dimensional multi-layer integrated structure. RF components and MEMS switch arrays are distributed across multiple layers within the package, enabling compact integration that reduces device footprint while maintaining manufacturing feasibility through standardized multi-layer fabrication techniques.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If traditional RF components are used, then basic wireless functionality is achieved, but insertion loss is high and Q factors are low

Engineering Contradiction:
Improvesignal qualityVSAvoidinsertion loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent extracts and eliminates uncontrollable stray inductances that are inherent in traditional discrete component arrangements. By integrating MEMS switches directly within the RF signal path in a controlled multi-layer structure, the patent removes parasitic elements that cause insertion loss and degrade Q factors, thereby improving signal quality and reducing energy loss.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces the size and cost of wireless devices by integrating RF components in the multi-layer package, improving performance with lower insertion loss and higher Q factors, thereby extending battery life and enhancing wireless communication capabilities.

Implementation Method 1

The MEMS switch arrays may be electrostatically activated

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Implementation Method 2

The MEMS switch arrays may be magnetically activated

Methodology Applied
Scientific EffectMagnetic force: Magnetic Field

Implementation Method 3

The integrated circuit may be coupled to the multiple-layer package via a flip-chip bonding technique

Methodology Applied
Scientific EffectBonding: Welding

Data Source

PatentEP2071733B1Method and system for MEMS switches fabricated in an integrated circuit package
Publication Date: 2019.08.21 AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LTD
  • EP2071733B1 patent drawingFigure 1
  • EP2071733B1 patent drawingFigure 2
  • EP2071733B1 patent drawingFigure 3

AI summary

Methods and systems for MEMS switches fabricated in an integrated circuit package are disclosed and may include controlling switching of RF components, and signals handled by the RF components, within an integrated circuit. One or more MEMS switch arrays embedded within a multi-layer package bonded to the integrated circuit may be utilized for the switching and signal control. The RF components and one or more MEMS switch arrays may be integrated in the multi-layer package. The RF components may be electrically coupled to the integrated circuit via the one or more MEMS switch arrays. The MEMS switch arrays may be electrostatically or magnetically activated. The RF components may be coupled to one or more capacitor arrays in the integrated circuit. The RF components may include transformers, inductors, transmission lines, microstrip and/or coplanar waveguide filters and/or surface mount devices. The integrated circuit may be coupled to the multiple-layer package utilizing a flip-chip bonding technique.