MEMS Switch Probe Card for Semiconductor Testing

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Conventional probe cards used for testing semiconductor devices often damage the devices due to the voltage generated by mechanical switches during electrical characteristic testing, which deteriorates measurement reliability.

Innovation Solution

A probe card incorporating Microelectromechanical Systems (MEMS) switches with control and connection portions that receive operation signals to connect input and output terminals and probe pins, allowing for precise and low-voltage signal transmission, with distances between MEMS switches and probe pins limited to no greater than 50 cm.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a mechanical switch is used in the probe card, then the switching operation can be performed, but the voltage generated by the mechanical switch may cause damage to the semiconductor devices

Engineering Contradiction:

Improvemeasurement reliabilityVSAvoidvoltage damage to semiconductor devices

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the mechanical switch with a MEMS (Microelectromechanical Systems) switch. The MEMS switch uses electrostatic actuation instead of mechanical contact, eliminating the high voltage generation associated with mechanical switching operations while maintaining the switching functionality required for electrical characteristic testing of semiconductor devices.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the operating parameters of the switch by using MEMS technology with electrostatic actuation. This reduces the voltage level required for switching operations from the high voltage levels produced by mechanical switches to lower voltage levels that do not damage semiconductor devices, while still achieving effective switching control.

Inventive Principle:

Principle #35Parameter changes

2Object-affected harmful factors

If the distance between the MEMS switch and probe pin is reduced to no greater than 50 cm, then the voltage required for switching operations is reduced, but the structural design becomes more constrained

Engineering Contradiction:

Improveswitching voltage levelVSAvoidstructural design constraints

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent applies local quality by optimizing the distance parameter specifically in the critical region between the MEMS switch and probe pin. By constraining this local distance to no greater than 50 cm, the patent reduces the voltage required for switching operations in this specific area without necessarily complicating the overall device structure, as the constraint is applied locally rather than globally.

Inventive Principle:

Principle #3Local quality

3Object-affected harmful factors

If MEMS switches are used instead of mechanical switches, then the voltage for switching operations is reduced, but the device structure becomes more complex

Engineering Contradiction:

Improveswitching voltageVSAvoidswitch structure

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent substitutes the mechanical switch structure with a MEMS switch structure that uses electrostatic actuation. While MEMS switches have different structural characteristics, they eliminate the mechanical contact components that generate high voltage, thereby reducing the switching voltage to safe levels for semiconductor devices while providing a compact and integrable structure.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of MEMS switches in the probe card reduces the voltage required for switching operations, preventing damage to semiconductor devices and enhancing measurement reliability by allowing for more precise and reliable electrical characteristic testing.

Implementation Method 1

a first input terminal Microelectromechanical Systems (MEMS) switch that connects a first input terminal and a first input probe pin

Methodology Applied

Scientific EffectMEMS (Microelectromechanical Systems): Microelectromechanical Systems

Data Source

PatentUS8581612B2Probe card and test apparatus including the same

Publication Date: 2013.11.12 SAMSUNG ELECTRONICS CO LTD

AI summary

A probe card and a test apparatus including the probe card for improving test reliability. The probe card may include a first input terminal Microelectromechanical Systems (MEMS) switch that connects a first input terminal and a first input probe pin, wherein the first input terminal MEMS switch comprises a control portion that receives an operation signal and a connection portion that connects the first input terminal and the first input probe pin. The probe card may further include a first output terminal MEMS switch that connects a first output terminal and a first output probe pin, wherein the first output terminal MEMS switch comprises a control portion that receives the operation signal and a connection portion that connects the first output terminal and the first output probe pin.